JPS6328335B2 - - Google Patents

Info

Publication number
JPS6328335B2
JPS6328335B2 JP55119332A JP11933280A JPS6328335B2 JP S6328335 B2 JPS6328335 B2 JP S6328335B2 JP 55119332 A JP55119332 A JP 55119332A JP 11933280 A JP11933280 A JP 11933280A JP S6328335 B2 JPS6328335 B2 JP S6328335B2
Authority
JP
Japan
Prior art keywords
layer
resist
etching
semiconductor substrate
wiring layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55119332A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5743418A (en
Inventor
Ichiro Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55119332A priority Critical patent/JPS5743418A/ja
Publication of JPS5743418A publication Critical patent/JPS5743418A/ja
Publication of JPS6328335B2 publication Critical patent/JPS6328335B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/069—Manufacture or treatment of conductive parts of the interconnections by forming self-aligned vias or self-aligned contact plugs

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP55119332A 1980-08-29 1980-08-29 Manufacture of semiconductor device Granted JPS5743418A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55119332A JPS5743418A (en) 1980-08-29 1980-08-29 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55119332A JPS5743418A (en) 1980-08-29 1980-08-29 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5743418A JPS5743418A (en) 1982-03-11
JPS6328335B2 true JPS6328335B2 (2) 1988-06-08

Family

ID=14758851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55119332A Granted JPS5743418A (en) 1980-08-29 1980-08-29 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5743418A (2)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5051257A (2) * 1973-09-05 1975-05-08

Also Published As

Publication number Publication date
JPS5743418A (en) 1982-03-11

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