JPS6122464B2 - - Google Patents
Info
- Publication number
- JPS6122464B2 JPS6122464B2 JP56177189A JP17718981A JPS6122464B2 JP S6122464 B2 JPS6122464 B2 JP S6122464B2 JP 56177189 A JP56177189 A JP 56177189A JP 17718981 A JP17718981 A JP 17718981A JP S6122464 B2 JPS6122464 B2 JP S6122464B2
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- wafer
- refracted
- reflected
- receiver
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
- H10P72/53—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment using optical controlling means
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56177189A JPS5879734A (ja) | 1981-11-06 | 1981-11-06 | ウエ−ハ有無判定テ−ブル位置制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56177189A JPS5879734A (ja) | 1981-11-06 | 1981-11-06 | ウエ−ハ有無判定テ−ブル位置制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5879734A JPS5879734A (ja) | 1983-05-13 |
| JPS6122464B2 true JPS6122464B2 (mo) | 1986-05-31 |
Family
ID=16026729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56177189A Granted JPS5879734A (ja) | 1981-11-06 | 1981-11-06 | ウエ−ハ有無判定テ−ブル位置制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5879734A (mo) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004025150B4 (de) * | 2004-05-21 | 2019-05-09 | Mattson Technology, Inc. | Lagebestimmung eines Halbleitersubstrats auf einer Rotationsvorrichtung |
-
1981
- 1981-11-06 JP JP56177189A patent/JPS5879734A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5879734A (ja) | 1983-05-13 |
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