JPS612341A - ウエハ移し換え治具 - Google Patents

ウエハ移し換え治具

Info

Publication number
JPS612341A
JPS612341A JP12181984A JP12181984A JPS612341A JP S612341 A JPS612341 A JP S612341A JP 12181984 A JP12181984 A JP 12181984A JP 12181984 A JP12181984 A JP 12181984A JP S612341 A JPS612341 A JP S612341A
Authority
JP
Japan
Prior art keywords
jig
cartridge
wafer
transfer
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12181984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0570936B2 (2
Inventor
Yoshiiku Sano
佐野　喜育
Tsugio Tanigawa
谷川　二男
Yutaka Ohashi
豊 大橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12181984A priority Critical patent/JPS612341A/ja
Publication of JPS612341A publication Critical patent/JPS612341A/ja
Publication of JPH0570936B2 publication Critical patent/JPH0570936B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Stacking Of Articles And Auxiliary Devices (AREA)
JP12181984A 1984-06-15 1984-06-15 ウエハ移し換え治具 Granted JPS612341A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12181984A JPS612341A (ja) 1984-06-15 1984-06-15 ウエハ移し換え治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12181984A JPS612341A (ja) 1984-06-15 1984-06-15 ウエハ移し換え治具

Publications (2)

Publication Number Publication Date
JPS612341A true JPS612341A (ja) 1986-01-08
JPH0570936B2 JPH0570936B2 (2) 1993-10-06

Family

ID=14820712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12181984A Granted JPS612341A (ja) 1984-06-15 1984-06-15 ウエハ移し換え治具

Country Status (1)

Country Link
JP (1) JPS612341A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07223289A (ja) * 1994-02-10 1995-08-22 Fuooles:Kk 複合板材

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5337056U (2) * 1976-09-07 1978-04-01
JPS5348591U (2) * 1976-09-27 1978-04-24

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5337056U (2) * 1976-09-07 1978-04-01
JPS5348591U (2) * 1976-09-27 1978-04-24

Also Published As

Publication number Publication date
JPH0570936B2 (2) 1993-10-06

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