JPH0527257B2 - - Google Patents
Info
- Publication number
- JPH0527257B2 JPH0527257B2 JP59125229A JP12522984A JPH0527257B2 JP H0527257 B2 JPH0527257 B2 JP H0527257B2 JP 59125229 A JP59125229 A JP 59125229A JP 12522984 A JP12522984 A JP 12522984A JP H0527257 B2 JPH0527257 B2 JP H0527257B2
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- cartridges
- wafers
- moving mechanism
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H10P72/3411—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H10P72/3412—Batch transfer of wafers
Landscapes
- Warehouses Or Storage Devices (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59125229A JPS615541A (ja) | 1984-06-20 | 1984-06-20 | 移し替え装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59125229A JPS615541A (ja) | 1984-06-20 | 1984-06-20 | 移し替え装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS615541A JPS615541A (ja) | 1986-01-11 |
| JPH0527257B2 true JPH0527257B2 (2) | 1993-04-20 |
Family
ID=14905014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59125229A Granted JPS615541A (ja) | 1984-06-20 | 1984-06-20 | 移し替え装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS615541A (2) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH068100Y2 (ja) * | 1986-07-01 | 1994-03-02 | 東京エレクトロン相模株式会社 | ウエハ移し替え突き上げ装置 |
| JPH01122135A (ja) * | 1987-11-06 | 1989-05-15 | Seiko Epson Corp | 半導体製造装置 |
| JPH07111963B2 (ja) * | 1988-09-12 | 1995-11-29 | 株式会社スガイ | 基板の洗浄乾燥装置 |
| JPH02215570A (ja) * | 1989-02-16 | 1990-08-28 | Matsushita Electric Ind Co Ltd | 印字装置 |
| CN113247611B (zh) * | 2021-04-20 | 2022-04-29 | 深圳市真味生物科技有限公司 | 一种电子雾化液调味瓶选取系统 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5945219B2 (ja) * | 1976-05-17 | 1984-11-05 | 株式会社日立製作所 | ウェハ処理装置 |
| JPS5434774A (en) * | 1977-08-24 | 1979-03-14 | Hitachi Ltd | Article transfer device |
| JPS5483371U (2) * | 1977-11-17 | 1979-06-13 | ||
| JPS5643718A (en) * | 1979-09-17 | 1981-04-22 | Mitsubishi Electric Corp | Semiconductor wafer shifting device |
| JPS56161653A (en) * | 1980-05-16 | 1981-12-12 | Fujitsu Ltd | Replacing device of wafer |
| JPS60258459A (ja) * | 1984-06-04 | 1985-12-20 | Deisuko Saiyaa Japan:Kk | 縦型熱処理装置 |
-
1984
- 1984-06-20 JP JP59125229A patent/JPS615541A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS615541A (ja) | 1986-01-11 |
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