JPS6124463B2 - - Google Patents

Info

Publication number: JPS6124463B2
Authority: JP; Japan
Prior art keywords: container; wall; treating; treated; gas
Prior art date: 1978-04-26
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP4959278A

Other languages

English (en)

Japanese (ja)

Other versions

JPS54141347A (en

Inventor

Shigeru Muto

Juichi Hata

Sadao Ishizeki

Michio Watanabe

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Japan Oxygen Co Ltd

Original Assignee

Japan Oxygen Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1978-04-26

Filing date

1978-04-26

Publication date

1986-06-11

1978-04-26 Application filed by Japan Oxygen Co Ltd filed Critical Japan Oxygen Co Ltd

1978-04-26 Priority to JP4959278A priority Critical patent/JPS54141347A/ja

1979-11-02 Publication of JPS54141347A publication Critical patent/JPS54141347A/ja

1986-06-11 Publication of JPS6124463B2 publication Critical patent/JPS6124463B2/ja

Status Granted legal-status Critical Current

Links

239000007789 gas Substances 0.000 claims description 56
238000000034 method Methods 0.000 claims description 36
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 24
VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 18
238000011282 treatment Methods 0.000 claims description 14
239000000203 mixture Substances 0.000 claims description 13
229910052742 iron Inorganic materials 0.000 claims description 12
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 11
229910052760 oxygen Inorganic materials 0.000 claims description 11
239000001301 oxygen Substances 0.000 claims description 11
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
238000010438 heat treatment Methods 0.000 claims description 9
230000001590 oxidative effect Effects 0.000 claims description 9
CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 7
238000005554 pickling Methods 0.000 claims description 6
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
238000001035 drying Methods 0.000 claims description 4
239000002253 acid Substances 0.000 claims description 3
238000004140 cleaning Methods 0.000 claims description 3
238000005406 washing Methods 0.000 claims description 3
MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 claims description 2
229910001873 dinitrogen Inorganic materials 0.000 claims description 2
JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 claims description 2
238000007789 sealing Methods 0.000 claims description 2
238000007664 blowing Methods 0.000 claims 1
150000003839 salts Chemical class 0.000 claims 1
MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 16
238000000576 coating method Methods 0.000 description 6
JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 5
229960003753 nitric oxide Drugs 0.000 description 5
239000004809 Teflon Substances 0.000 description 4
229920006362 Teflon® Polymers 0.000 description 4
238000002474 experimental method Methods 0.000 description 4
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
229910052737 gold Inorganic materials 0.000 description 4
239000010931 gold Substances 0.000 description 4
238000007747 plating Methods 0.000 description 4
239000011248 coating agent Substances 0.000 description 3
229910052757 nitrogen Inorganic materials 0.000 description 3
238000009489 vacuum treatment Methods 0.000 description 3
UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
229910000617 Mangalloy Inorganic materials 0.000 description 2
RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
238000010306 acid treatment Methods 0.000 description 2
229910002091 carbon monoxide Inorganic materials 0.000 description 2
238000006243 chemical reaction Methods 0.000 description 2
238000007796 conventional method Methods 0.000 description 2
238000003795 desorption Methods 0.000 description 2
238000001179 sorption measurement Methods 0.000 description 2
230000000694 effects Effects 0.000 description 1
239000011261 inert gas Substances 0.000 description 1
238000007689 inspection Methods 0.000 description 1
238000009434 installation Methods 0.000 description 1
239000011347 resin Substances 0.000 description 1
229920005989 resin Polymers 0.000 description 1
238000013020 steam cleaning Methods 0.000 description 1
239000000126 substance Substances 0.000 description 1

Landscapes

Cleaning In General (AREA)
Furnace Housings, Linings, Walls, And Ceilings (AREA)

JP4959278A 1978-04-26 1978-04-26 Treatment of internal surface of iron container Granted JPS54141347A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP4959278A JPS54141347A (en)	1978-04-26	1978-04-26	Treatment of internal surface of iron container

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP4959278A JPS54141347A (en)	1978-04-26	1978-04-26	Treatment of internal surface of iron container

Publications (2)

Publication Number	Publication Date
JPS54141347A JPS54141347A (en)	1979-11-02
JPS6124463B2 true JPS6124463B2 (2)	1986-06-11

Family

ID=12835496

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP4959278A Granted JPS54141347A (en)	1978-04-26	1978-04-26	Treatment of internal surface of iron container

Country Status (1)

Country	Link
JP (1)	JPS54141347A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2004245249A (ja) *	2003-02-10	2004-09-02	Mcc Kogyo:Kk	高純度高圧ガス用容器およびその製造方法

1978
- 1978-04-26 JP JP4959278A patent/JPS54141347A/ja active Granted

Also Published As

Publication number	Publication date
JPS54141347A (en)	1979-11-02

Similar Documents

Publication	Publication Date	Title
KR100332402B1 (ko)	2002-10-25	Hf와카르복실산혼합물을사용한반도체처리방법
JPH0419426B2 (2)	1992-03-30
JP2804700B2 (ja)	1998-09-30	半導体装置の製造装置及び半導体装置の製造方法
US5536320A (en)	1996-07-16	Processing apparatus
Griffiths et al.	1978	Infrared study of the adsorption of acetone on rutile
JP2003526936A (ja)	2003-09-09	電子部品処理用の方法及び装置
JP2017512173A (ja)	2017-05-18	ガラスフラスコの内表面を不動態化する方法及び装置、並びにこのような方法によって得られるフラスコ
JPS6124463B2 (2)	1986-06-11
JP2956347B2 (ja)	1999-10-04	半導体基板洗浄方法
KR19990062702A (ko)	1999-07-26	반도체 기판의 처리방법
TW427952B (en)	2001-04-01	Procedure for drying silicon
US4308301A (en)	1981-12-29	Process for metal-coating plastic surfaces
JPS61236635A (ja)	1986-10-21	ガラスの表面処理法
JPH05331630A (ja)	1993-12-14	三フッ化塩素ガスの除去方法
US3442657A (en)	1969-05-06	Preserving hops by drying and maintaining in an inert atmosphere
CN117191932A (zh)	2023-12-08	一种硅片表面金属回收率的测试方法及系统
JPS6386878A (ja)	1988-04-18	電解コンデンサ電極用アルミニウム箔の製造方法
CN114042684A (zh)	2022-02-15	一种磷化铟晶片及其混合清洗工艺
JPH1151848A (ja)	1999-02-26	腐食試験方法およびその装置
JPH11124386A (ja)	1999-05-11	トリメトキシシランの安定化方法
CN115738956B (zh)	2025-06-17	一种二甲基二烯丙基氯化铵溶液照射装置及脱色方法
JPS63162038A (ja)	1988-07-05	洗浄水置換方法
JP2814231B2 (ja)	1998-10-22	風化したガラス容器の再生処理方法
US1011352A (en)	1911-12-12	Preserving eggs.
CN110088355B (zh)	2021-06-11	基底疏水化的方法