JPS61281130A - スルフィド系高分子重合体及びその製造方法 - Google Patents

スルフィド系高分子重合体及びその製造方法

Info

Publication number
JPS61281130A
JPS61281130A JP60122565A JP12256585A JPS61281130A JP S61281130 A JPS61281130 A JP S61281130A JP 60122565 A JP60122565 A JP 60122565A JP 12256585 A JP12256585 A JP 12256585A JP S61281130 A JPS61281130 A JP S61281130A
Authority
JP
Japan
Prior art keywords
chalcogenide
high polymer
polymer
polyvinylene
ethylene
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60122565A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0329244B2 (cs
Inventor
Yukihiro Ikeda
幸弘 池田
Masaru Ozaki
勝 尾崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60122565A priority Critical patent/JPS61281130A/ja
Publication of JPS61281130A publication Critical patent/JPS61281130A/ja
Publication of JPH0329244B2 publication Critical patent/JPH0329244B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
JP60122565A 1985-06-07 1985-06-07 スルフィド系高分子重合体及びその製造方法 Granted JPS61281130A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60122565A JPS61281130A (ja) 1985-06-07 1985-06-07 スルフィド系高分子重合体及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60122565A JPS61281130A (ja) 1985-06-07 1985-06-07 スルフィド系高分子重合体及びその製造方法

Publications (2)

Publication Number Publication Date
JPS61281130A true JPS61281130A (ja) 1986-12-11
JPH0329244B2 JPH0329244B2 (cs) 1991-04-23

Family

ID=14839036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60122565A Granted JPS61281130A (ja) 1985-06-07 1985-06-07 スルフィド系高分子重合体及びその製造方法

Country Status (1)

Country Link
JP (1) JPS61281130A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9159595B2 (en) * 2010-02-09 2015-10-13 Suss Microtec Lithography Gmbh Thin wafer carrier

Also Published As

Publication number Publication date
JPH0329244B2 (cs) 1991-04-23

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term