JPH0329244B2 - - Google Patents

Info

Publication number
JPH0329244B2
JPH0329244B2 JP60122565A JP12256585A JPH0329244B2 JP H0329244 B2 JPH0329244 B2 JP H0329244B2 JP 60122565 A JP60122565 A JP 60122565A JP 12256585 A JP12256585 A JP 12256585A JP H0329244 B2 JPH0329244 B2 JP H0329244B2
Authority
JP
Japan
Prior art keywords
polymer
sulfide
pyridine ring
dihalogenated
ethylene
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60122565A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61281130A (ja
Inventor
Yukihiro Ikeda
Masaru Ozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60122565A priority Critical patent/JPS61281130A/ja
Publication of JPS61281130A publication Critical patent/JPS61281130A/ja
Publication of JPH0329244B2 publication Critical patent/JPH0329244B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
JP60122565A 1985-06-07 1985-06-07 スルフィド系高分子重合体及びその製造方法 Granted JPS61281130A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60122565A JPS61281130A (ja) 1985-06-07 1985-06-07 スルフィド系高分子重合体及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60122565A JPS61281130A (ja) 1985-06-07 1985-06-07 スルフィド系高分子重合体及びその製造方法

Publications (2)

Publication Number Publication Date
JPS61281130A JPS61281130A (ja) 1986-12-11
JPH0329244B2 true JPH0329244B2 (cs) 1991-04-23

Family

ID=14839036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60122565A Granted JPS61281130A (ja) 1985-06-07 1985-06-07 スルフィド系高分子重合体及びその製造方法

Country Status (1)

Country Link
JP (1) JPS61281130A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130018236A (ko) * 2010-02-09 2013-02-20 수스 마이크로텍 리소그라피 게엠바하 얇은 웨이퍼 캐리어

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130018236A (ko) * 2010-02-09 2013-02-20 수스 마이크로텍 리소그라피 게엠바하 얇은 웨이퍼 캐리어

Also Published As

Publication number Publication date
JPS61281130A (ja) 1986-12-11

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term