JPS6132514B2 - - Google Patents

Info

Publication number
JPS6132514B2
JPS6132514B2 JP52156708A JP15670877A JPS6132514B2 JP S6132514 B2 JPS6132514 B2 JP S6132514B2 JP 52156708 A JP52156708 A JP 52156708A JP 15670877 A JP15670877 A JP 15670877A JP S6132514 B2 JPS6132514 B2 JP S6132514B2
Authority
JP
Japan
Prior art keywords
panel
outer periphery
operated
pump
panels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52156708A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5489309A (en
Inventor
Chikara Hayashi
Muneharu Komya
Kyoshi Oshii
Masaki Saito
Hidetoshi Morimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP15670877A priority Critical patent/JPS5489309A/ja
Publication of JPS5489309A publication Critical patent/JPS5489309A/ja
Publication of JPS6132514B2 publication Critical patent/JPS6132514B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP15670877A 1977-12-27 1977-12-27 Cryoopump Granted JPS5489309A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15670877A JPS5489309A (en) 1977-12-27 1977-12-27 Cryoopump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15670877A JPS5489309A (en) 1977-12-27 1977-12-27 Cryoopump

Publications (2)

Publication Number Publication Date
JPS5489309A JPS5489309A (en) 1979-07-16
JPS6132514B2 true JPS6132514B2 (2) 1986-07-28

Family

ID=15633589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15670877A Granted JPS5489309A (en) 1977-12-27 1977-12-27 Cryoopump

Country Status (1)

Country Link
JP (1) JPS5489309A (2)

Also Published As

Publication number Publication date
JPS5489309A (en) 1979-07-16

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