JPS6144320A - 長さの測定および調節のための方法と装置 - Google Patents
長さの測定および調節のための方法と装置Info
- Publication number
- JPS6144320A JPS6144320A JP60068607A JP6860785A JPS6144320A JP S6144320 A JPS6144320 A JP S6144320A JP 60068607 A JP60068607 A JP 60068607A JP 6860785 A JP6860785 A JP 6860785A JP S6144320 A JPS6144320 A JP S6144320A
- Authority
- JP
- Japan
- Prior art keywords
- length
- distance
- grating
- detection
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 title claims description 27
- 238000000034 method Methods 0.000 title claims description 11
- 238000001514 detection method Methods 0.000 claims description 76
- 238000011156 evaluation Methods 0.000 claims description 31
- 238000012937 correction Methods 0.000 claims description 25
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 230000005693 optoelectronics Effects 0.000 claims description 5
- 230000003993 interaction Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 description 5
- 108010076504 Protein Sorting Signals Proteins 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000032683 aging Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000013013 elastic material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- IYRDVAUFQZOLSB-UHFFFAOYSA-N copper iron Chemical compound [Fe].[Cu] IYRDVAUFQZOLSB-UHFFFAOYSA-N 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000000275 quality assurance Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24428—Error prevention
- G01D5/24433—Error prevention by mechanical means
- G01D5/24438—Special design of the sensing element or scale
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/24476—Signal processing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Signal Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD84261535A DD225497A1 (de) | 1984-04-02 | 1984-04-02 | Einrichtung und verfahren zum messen und einstellen von laengen |
| DD02B/261535-2 | 1984-04-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6144320A true JPS6144320A (ja) | 1986-03-04 |
Family
ID=5555828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60068607A Pending JPS6144320A (ja) | 1984-04-02 | 1985-04-02 | 長さの測定および調節のための方法と装置 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS6144320A (de) |
| CH (1) | CH669254A5 (de) |
| DD (1) | DD225497A1 (de) |
| DE (1) | DE3506537A1 (de) |
| GB (1) | GB2156989B (de) |
| IT (1) | IT1184929B (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5695300A (en) * | 1978-04-28 | 1981-08-01 | Texas Instruments Inc | Voice synthesizer |
| JP2009252986A (ja) * | 2008-04-04 | 2009-10-29 | Nikon Corp | 較正方法、露光方法及びデバイス製造方法、並びに露光装置 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3644979A1 (de) * | 1986-12-24 | 1988-07-07 | Pav Praezisions Apparatebau Ag | Messkluppe |
| DE3711070A1 (de) * | 1987-04-02 | 1988-11-24 | Heidenhain Gmbh Dr Johannes | Laengen- oder winkelmesseinrichtung |
| GB2204691A (en) * | 1987-05-07 | 1988-11-16 | Advanced Manufacturing Technol | Position measurement |
| JP2648181B2 (ja) * | 1988-08-31 | 1997-08-27 | オ−クマ株式会社 | リニアエンコーダ |
| DE19625016B4 (de) * | 1996-06-22 | 2004-07-01 | Robert Bosch Gmbh | Verfahren zur genauen Positionsmessung |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB760321A (en) * | 1953-03-14 | 1956-10-31 | Ferranti Ltd | Improvements relating to measuring apparatus |
| DE1266001B (de) * | 1963-12-04 | 1968-04-11 | Contraves Ag | Vorrichtung zur Erhoehung der Messgenauigkeit bei optisch-elektrischen Messeinrichtungen |
| US3197873A (en) * | 1963-12-16 | 1965-08-03 | Sheffield Corp | Gaging device |
| GB1070150A (en) * | 1964-09-30 | 1967-05-24 | Spezialwaagenfabrik Rapido Veb | Device for conversion of movement of an indicating element into electrical digital signals |
| US3597750A (en) * | 1969-01-21 | 1971-08-03 | Information Storage Systems | Servo with agc for positioning a magnetic head |
| DE2952106C2 (de) * | 1979-12-22 | 1982-11-04 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Lichtelektrische inkrementale Längen- oder Winkelmeßeinrichtung |
| GB2111199A (en) * | 1981-12-02 | 1983-06-29 | Gec Elliott Mech Handling | Movement monitor |
-
1984
- 1984-04-02 DD DD84261535A patent/DD225497A1/de not_active IP Right Cessation
-
1985
- 1985-02-25 DE DE19853506537 patent/DE3506537A1/de not_active Withdrawn
- 1985-03-26 IT IT67290/85A patent/IT1184929B/it active
- 1985-03-29 GB GB08508212A patent/GB2156989B/en not_active Expired
- 1985-04-01 CH CH1411/85A patent/CH669254A5/de not_active IP Right Cessation
- 1985-04-02 JP JP60068607A patent/JPS6144320A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5695300A (en) * | 1978-04-28 | 1981-08-01 | Texas Instruments Inc | Voice synthesizer |
| JP2009252986A (ja) * | 2008-04-04 | 2009-10-29 | Nikon Corp | 較正方法、露光方法及びデバイス製造方法、並びに露光装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| DD225497A1 (de) | 1985-07-31 |
| DE3506537A1 (de) | 1985-10-10 |
| CH669254A5 (de) | 1989-02-28 |
| GB2156989B (en) | 1988-02-03 |
| GB8508212D0 (en) | 1985-05-09 |
| IT8567290A0 (it) | 1985-03-26 |
| GB2156989A (en) | 1985-10-16 |
| IT1184929B (it) | 1987-10-28 |
| IT8567290A1 (it) | 1986-09-26 |
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