JPS6148276B2 - - Google Patents
Info
- Publication number
- JPS6148276B2 JPS6148276B2 JP55171375A JP17137580A JPS6148276B2 JP S6148276 B2 JPS6148276 B2 JP S6148276B2 JP 55171375 A JP55171375 A JP 55171375A JP 17137580 A JP17137580 A JP 17137580A JP S6148276 B2 JPS6148276 B2 JP S6148276B2
- Authority
- JP
- Japan
- Prior art keywords
- amorphous silicon
- type
- silane
- layer
- photoelectric device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
- H10F71/103—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials
- H10F71/1035—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials having multiple Group IV elements, e.g. SiGe or SiC
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/17—Photovoltaic cells having only PIN junction potential barriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
- H10F71/103—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
Priority Applications (12)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55171375A JPS5795677A (en) | 1980-12-03 | 1980-12-03 | Amorphous silicon type photoelectric tranducer |
| US06/253,141 US4385199A (en) | 1980-12-03 | 1981-04-10 | Photovoltaic cell having a hetero junction of amorphous silicon carbide and amorphous silicon |
| CA000391378A CA1176740A (fr) | 1980-12-03 | 1981-12-02 | Cellule photovoltaique a haute tension ayant une heterojonction de semiconducteur amorphe et de silicium amorphe |
| EP81110111A EP0053402B1 (fr) | 1980-12-03 | 1981-12-03 | Cellule photovoltaique pin à hétéro-jonction entre un composé de silicium amorpheet du silicium amorphe |
| AU78224/81A AU558650B2 (en) | 1980-12-03 | 1981-12-03 | Amorphous semiconductor high-voltage photovoltaic cell |
| DE8181110111T DE3176919D1 (en) | 1980-12-03 | 1981-12-03 | Pin photovoltaic cell having a hetero junction of amorphous siliconcompound and amorphous silicon |
| MX81190403A MX157367A (es) | 1980-02-04 | 1981-12-03 | Mejoras a celda fotovoltaica de tipo de silicio amorfo p-i-n |
| AT81110111T ATE38296T1 (de) | 1980-12-03 | 1981-12-03 | Photovolteische zelle vom pin-typ mit heterouebergang zwischen einer amorphen siliziumverbindung und amorphem silizium. |
| US06/420,711 US4385200A (en) | 1980-12-03 | 1982-09-21 | Photovoltaic cell having a hetero junction of amorphous silicon carbide and amorphous silicon |
| AU65542/86A AU588400B2 (en) | 1980-12-03 | 1986-11-20 | High-voltage photovoltaic cell having a hetero junction of amorphous semiconductor and amorphous silicon |
| SG65589A SG65589G (en) | 1980-12-03 | 1989-09-20 | Pin photovoltaic cell having a hetero junction of amorphous silicon compound and amorphous silicon |
| HK796/89A HK79689A (en) | 1980-12-03 | 1989-10-05 | Pin photovoltaic cell having a hetero junction of amorphous silicon compound and amorphous silicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55171375A JPS5795677A (en) | 1980-12-03 | 1980-12-03 | Amorphous silicon type photoelectric tranducer |
Related Child Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58044689A Division JPS58190072A (ja) | 1983-03-16 | 1983-03-16 | アモルフアスシリコン系光電素子 |
| JP58044688A Division JPS58190810A (ja) | 1983-03-16 | 1983-03-16 | P型アモルフアスシリコンカ−バイドの製造方法 |
| JP3341477A Division JPH05343714A (ja) | 1991-12-24 | 1991-12-24 | アモルフアスシリコン系光電素子の製造方法 |
| JP4113635A Division JP2530408B2 (ja) | 1992-05-06 | 1992-05-06 | アモルフアスシリコン系光電素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5795677A JPS5795677A (en) | 1982-06-14 |
| JPS6148276B2 true JPS6148276B2 (fr) | 1986-10-23 |
Family
ID=15922010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55171375A Granted JPS5795677A (en) | 1980-02-04 | 1980-12-03 | Amorphous silicon type photoelectric tranducer |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS5795677A (fr) |
| AU (1) | AU588400B2 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62268128A (ja) * | 1986-05-15 | 1987-11-20 | Sharp Corp | 微結晶炭化珪素膜の製造方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4064521A (en) * | 1975-07-28 | 1977-12-20 | Rca Corporation | Semiconductor device having a body of amorphous silicon |
| JPS5337718A (en) * | 1976-09-21 | 1978-04-07 | Asahi Glass Co Ltd | Laminated glass with heating wire incorporated therein |
| US4109271A (en) * | 1977-05-27 | 1978-08-22 | Rca Corporation | Amorphous silicon-amorphous silicon carbide photovoltaic device |
| US4167015A (en) * | 1978-04-24 | 1979-09-04 | Rca Corporation | Cermet layer for amorphous silicon solar cells |
| US4162505A (en) * | 1978-04-24 | 1979-07-24 | Rca Corporation | Inverted amorphous silicon solar cell utilizing cermet layers |
| US4163677A (en) * | 1978-04-28 | 1979-08-07 | Rca Corporation | Schottky barrier amorphous silicon solar cell with thin doped region adjacent metal Schottky barrier |
| JPS5568681A (en) * | 1978-11-17 | 1980-05-23 | Yoshihiro Hamakawa | Amorphous silicon solar battery and fabricating the same |
| JPS5578524A (en) * | 1978-12-10 | 1980-06-13 | Shunpei Yamazaki | Manufacture of semiconductor device |
| JPS55127080A (en) * | 1979-03-26 | 1980-10-01 | Matsushita Electric Ind Co Ltd | Photoconductive element |
| DE3032158A1 (de) * | 1979-08-30 | 1981-04-02 | Plessey Overseas Ltd., Ilford, Essex | Solarzelle |
| JPS56125881A (en) * | 1980-03-06 | 1981-10-02 | Fuji Photo Film Co Ltd | Optical semiconductor element |
| FR2490018B1 (fr) * | 1980-09-09 | 1986-01-17 | Energy Conversion Devices Inc | Procede et dispositif pour etalonner les intervalles de bande d'alliages semi-conducteurs amorphes et alliages obtenus |
| US4394426A (en) * | 1980-09-25 | 1983-07-19 | Canon Kabushiki Kaisha | Photoconductive member with α-Si(N) barrier layer |
| JPS5944791A (ja) * | 1982-09-07 | 1984-03-13 | 株式会社日立ホームテック | ワイヤレスプロ−ブを備えた高周波加熱装置 |
-
1980
- 1980-12-03 JP JP55171375A patent/JPS5795677A/ja active Granted
-
1986
- 1986-11-20 AU AU65542/86A patent/AU588400B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5795677A (en) | 1982-06-14 |
| AU6554286A (en) | 1987-02-19 |
| AU588400B2 (en) | 1989-09-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0070509B1 (fr) | Semiconducteur amorphe et dispositif photovoltaique en silicium amorphe | |
| US4385199A (en) | Photovoltaic cell having a hetero junction of amorphous silicon carbide and amorphous silicon | |
| US4504518A (en) | Method of making amorphous semiconductor alloys and devices using microwave energy | |
| US4615905A (en) | Method of depositing semiconductor films by free radical generation | |
| US5256887A (en) | Photovoltaic device including a boron doping profile in an i-type layer | |
| US4664937A (en) | Method of depositing semiconductor films by free radical generation | |
| US4517223A (en) | Method of making amorphous semiconductor alloys and devices using microwave energy | |
| US5646050A (en) | Increasing stabilized performance of amorphous silicon based devices produced by highly hydrogen diluted lower temperature plasma deposition | |
| US6368892B1 (en) | Monolithic multi-junction solar cells with amorphous silicon and CIS and their alloys | |
| US5730808A (en) | Producing solar cells by surface preparation for accelerated nucleation of microcrystalline silicon on heterogeneous substrates | |
| US4544423A (en) | Amorphous silicon semiconductor and process for same | |
| US4398054A (en) | Compensated amorphous silicon solar cell incorporating an insulating layer | |
| US4396793A (en) | Compensated amorphous silicon solar cell | |
| JP2692091B2 (ja) | 炭化ケイ素半導体膜およびその製造方法 | |
| JP2719036B2 (ja) | 非晶質光電変換装置およびその製造方法 | |
| JPH0363229B2 (fr) | ||
| JPH0544198B2 (fr) | ||
| JPH0340515B2 (fr) | ||
| US4701343A (en) | Method of depositing thin films using microwave energy | |
| JP2530408B2 (ja) | アモルフアスシリコン系光電素子の製造方法 | |
| Tanaka et al. | Amorphous silicon solar cells fabricated by photochemical vapor deposition | |
| JPS6148276B2 (fr) | ||
| Ohnishi et al. | Preparation and photovoltaic characteristics of a-Si solar cells produced by a consecutive, separated reaction chamber method | |
| Yang et al. | Microcrystalline Silicon in a-SI: H Based Multljunction Solar Cells | |
| JPS6216031B2 (fr) |