JPS6156164B2 - - Google Patents

Info

Publication number
JPS6156164B2
JPS6156164B2 JP57041931A JP4193182A JPS6156164B2 JP S6156164 B2 JPS6156164 B2 JP S6156164B2 JP 57041931 A JP57041931 A JP 57041931A JP 4193182 A JP4193182 A JP 4193182A JP S6156164 B2 JPS6156164 B2 JP S6156164B2
Authority
JP
Japan
Prior art keywords
reaction
silicon
trichlorosilane
copper
silicon tetrachloride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57041931A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58161915A (ja
Inventor
Yasushi Kobayashi
Hitoshi Araki
Takaaki Shimizu
Hideji Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd filed Critical Shin-Etsu Chemical Co Ltd
Priority to JP57041931A priority Critical patent/JPS58161915A/ja
Publication of JPS58161915A publication Critical patent/JPS58161915A/ja
Publication of JPS6156164B2 publication Critical patent/JPS6156164B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
  • Catalysts (AREA)
JP57041931A 1982-03-17 1982-03-17 トリクロロシランの製造方法 Granted JPS58161915A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57041931A JPS58161915A (ja) 1982-03-17 1982-03-17 トリクロロシランの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57041931A JPS58161915A (ja) 1982-03-17 1982-03-17 トリクロロシランの製造方法

Publications (2)

Publication Number Publication Date
JPS58161915A JPS58161915A (ja) 1983-09-26
JPS6156164B2 true JPS6156164B2 (da) 1986-12-01

Family

ID=12621973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57041931A Granted JPS58161915A (ja) 1982-03-17 1982-03-17 トリクロロシランの製造方法

Country Status (1)

Country Link
JP (1) JPS58161915A (da)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103007995A (zh) * 2012-12-17 2013-04-03 四川大学 一种用于催化氢化四氯化硅制备三氯氢硅的复合催化剂
CN103723734A (zh) * 2012-10-10 2014-04-16 浙江昱辉阳光能源有限公司 一种制备三氯氢硅的工艺

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197128A (ja) * 1984-10-19 1986-05-15 Denki Kagaku Kogyo Kk シラン化合物の連続的製造法
JPS63233007A (ja) * 1987-03-23 1988-09-28 Mitsubishi Metal Corp クロロポリシランの製造方法
DE10061682A1 (de) * 2000-12-11 2002-07-04 Solarworld Ag Verfahren zur Herstellung von Reinstsilicium
JP4813545B2 (ja) * 2005-03-09 2011-11-09 アールイーシー シリコン インコーポレイテッド ヒドロクロロシランの製造方法
JP5542026B2 (ja) 2010-10-27 2014-07-09 信越化学工業株式会社 クロロシラン類の精製方法
EP2668194A1 (en) * 2011-01-25 2013-12-04 Dow Corning Corporation Method of preparing a diorganodihalosilane
JP5507498B2 (ja) * 2011-06-21 2014-05-28 信越化学工業株式会社 クロロシラン類の精製方法
KR101519498B1 (ko) * 2013-06-19 2015-05-12 한화케미칼 주식회사 트리클로로실란의 제조방법

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103723734A (zh) * 2012-10-10 2014-04-16 浙江昱辉阳光能源有限公司 一种制备三氯氢硅的工艺
CN103007995A (zh) * 2012-12-17 2013-04-03 四川大学 一种用于催化氢化四氯化硅制备三氯氢硅的复合催化剂
CN103007995B (zh) * 2012-12-17 2015-08-12 四川大学 一种用于催化氢化四氯化硅制备三氯氢硅的复合催化剂

Also Published As

Publication number Publication date
JPS58161915A (ja) 1983-09-26

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