JPS6157903B2 - - Google Patents

Info

Publication number
JPS6157903B2
JPS6157903B2 JP56127790A JP12779081A JPS6157903B2 JP S6157903 B2 JPS6157903 B2 JP S6157903B2 JP 56127790 A JP56127790 A JP 56127790A JP 12779081 A JP12779081 A JP 12779081A JP S6157903 B2 JPS6157903 B2 JP S6157903B2
Authority
JP
Japan
Prior art keywords
mask
ring
shaped
frame
annular groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56127790A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5831077A (ja
Inventor
Minoru Tanaka
Hitoshi Kubota
Susumu Aiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12779081A priority Critical patent/JPS5831077A/ja
Publication of JPS5831077A publication Critical patent/JPS5831077A/ja
Publication of JPS6157903B2 publication Critical patent/JPS6157903B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP12779081A 1981-08-17 1981-08-17 マスク構造体 Granted JPS5831077A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12779081A JPS5831077A (ja) 1981-08-17 1981-08-17 マスク構造体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12779081A JPS5831077A (ja) 1981-08-17 1981-08-17 マスク構造体

Publications (2)

Publication Number Publication Date
JPS5831077A JPS5831077A (ja) 1983-02-23
JPS6157903B2 true JPS6157903B2 (de) 1986-12-09

Family

ID=14968737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12779081A Granted JPS5831077A (ja) 1981-08-17 1981-08-17 マスク構造体

Country Status (1)

Country Link
JP (1) JPS5831077A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10132348A1 (de) * 2001-07-04 2003-02-06 Aixtron Ag Masken- und Substrathalteranordnung
KR20040037286A (ko) * 2002-10-28 2004-05-07 주식회사 엘리아테크 유기 전계 발광 디스플레이용 섀도우 마스크 고정용마스크 프레임
KR101281909B1 (ko) * 2006-06-30 2013-07-03 엘지디스플레이 주식회사 박막 증착 장치
KR102079170B1 (ko) * 2013-04-09 2020-02-20 삼성디스플레이 주식회사 증착 장치 및 그에 적용되는 마스크 조립체
CN112662994B (zh) * 2020-12-04 2023-04-25 合肥维信诺科技有限公司 掩膜版及其制备方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS525956U (de) * 1975-07-01 1977-01-17
JPS5926506Y2 (ja) * 1977-08-26 1984-08-01 株式会社東芝 陰極筒塗装用支持装置

Also Published As

Publication number Publication date
JPS5831077A (ja) 1983-02-23

Similar Documents

Publication Publication Date Title
JP3930048B2 (ja) 電極クランピングアセンブリ及びその組み立て方法並びにその利用方法
US4076393A (en) Thermal stress-relieving coupling member and support
JP2911954B2 (ja) Ｘ線マスク構造体
JPS6157903B2 (de)
JPH10317139A (ja) 金属箔マスク用磁力保持装置
US4372248A (en) Apparatus for accurately registering a member and a substrate in an interdependent relationship
US5038459A (en) Method of fabricating the diaphragm unit of a condenser microphone by electron beam welding
US4376580A (en) Projection aligner with bending mirror
US6237242B1 (en) Microradian adjustment assembly
JPH11173440A (ja) 流量制御バルブ
US2567889A (en) Condenser microphone structure
JP4084534B2 (ja) 樹脂製弁及びその組立構造
US2500643A (en) Condenser transducer independent of ambient atmospheric conditions
US2582410A (en) Slit mechanism
JPH02226996A (ja) 圧電素子接着装置および圧電素子接着方法
JP2565593Y2 (ja) 光共振装置
JPH0612972A (ja) 熱電界放射電子銃
JPH02302031A (ja) 半導体素子の製造装置
JP2522680Y2 (ja) ビームスプリッタ及びコンペンセイタ保持機構
JPS5937772Y2 (ja) 光学系微調整装置
JP2001035021A (ja) スタンパロール
JPH0234781A (ja) レンズのコーティング治具
JPS6459809A (en) Formation of low-stress thin film and its manufacture
JPS6336497Y2 (de)
JPH03281772A (ja) マグネットチャック式基板ホルダー