JPS62103622A - 金属酸化物薄膜の製造法 - Google Patents

金属酸化物薄膜の製造法

Info

Publication number
JPS62103622A
JPS62103622A JP60244894A JP24489485A JPS62103622A JP S62103622 A JPS62103622 A JP S62103622A JP 60244894 A JP60244894 A JP 60244894A JP 24489485 A JP24489485 A JP 24489485A JP S62103622 A JPS62103622 A JP S62103622A
Authority
JP
Japan
Prior art keywords
carbon
metal
film
oxide film
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60244894A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0146855B2 (2
Inventor
Yoshiyuki Sato
義幸 佐藤
Koichi Ono
小野　耕一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Sakura Color Products Corp
Original Assignee
Agency of Industrial Science and Technology
Sakura Color Products Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Sakura Color Products Corp filed Critical Agency of Industrial Science and Technology
Priority to JP60244894A priority Critical patent/JPS62103622A/ja
Publication of JPS62103622A publication Critical patent/JPS62103622A/ja
Publication of JPH0146855B2 publication Critical patent/JPH0146855B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
JP60244894A 1985-10-30 1985-10-30 金属酸化物薄膜の製造法 Granted JPS62103622A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60244894A JPS62103622A (ja) 1985-10-30 1985-10-30 金属酸化物薄膜の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60244894A JPS62103622A (ja) 1985-10-30 1985-10-30 金属酸化物薄膜の製造法

Publications (2)

Publication Number Publication Date
JPS62103622A true JPS62103622A (ja) 1987-05-14
JPH0146855B2 JPH0146855B2 (2) 1989-10-11

Family

ID=17125558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60244894A Granted JPS62103622A (ja) 1985-10-30 1985-10-30 金属酸化物薄膜の製造法

Country Status (1)

Country Link
JP (1) JPS62103622A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0892766A (ja) * 1994-09-27 1996-04-09 Agency Of Ind Science & Technol プラズマ酸化による酸化ニッケル膜の製造方法
US5853819A (en) * 1994-08-30 1998-12-29 Eastman Kodak Company Imaging element comprising an electrically conductive layer formed by a glow discharge process

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5853819A (en) * 1994-08-30 1998-12-29 Eastman Kodak Company Imaging element comprising an electrically conductive layer formed by a glow discharge process
JPH0892766A (ja) * 1994-09-27 1996-04-09 Agency Of Ind Science & Technol プラズマ酸化による酸化ニッケル膜の製造方法

Also Published As

Publication number Publication date
JPH0146855B2 (2) 1989-10-11

Similar Documents

Publication Publication Date Title
US5030331A (en) Process for preparing iridium oxide film
KR100649838B1 (ko) 투명한 전도성 적층물 및 이의 제조방법
US5395704A (en) Solid-oxide fuel cells
CN110444751B (zh) Li-Si-N纳米复合薄膜及其制备方法、负极结构及锂电池
Sato et al. Electrochromism in Iridium Oxide Films Prepared by Thermal Oxidation of Iridium‐Carbon Composite Films
US4965142A (en) Molybdenum-platinum-oxide electrodes for thermoelectric generators
Bae et al. Post-annealing of thin-film yttria stabilized zirconia electrolytes for anode-supported low-temperature solid oxide fuel cells
US4847171A (en) Molybdenum oxide electrodes for thermoelectric generators
CN101609898B (zh) 具有憎水性的金属基燃料电池双极板的制备方法
US3511714A (en) Chemical source of electrical current,catalyst suitable for use therein and method for the manufacturing thereof
JPH0146855B2 (2)
KR20250115833A (ko) 공동 스퍼터링법을 이용하여 제조된 고체산화물 연료전지
JPS62156261A (ja) 加熱酸化による酸化イリジウム膜の製造方法
JPH03101033A (ja) 薄膜の製造方法
JPS5850419B2 (ja) 圧電性薄膜の製造方法
JP2003027216A (ja) 透明導電膜の製造方法および装置
JPH05290863A (ja) 平板型固体電解質燃料電池用金属インタコネクタの耐酸化表面改質法
JP2642884B2 (ja) 加熱酸化による酸化ニッケル膜の製造方法
JPH0892766A (ja) プラズマ酸化による酸化ニッケル膜の製造方法
SU950798A1 (ru) Способ получени провод щих прозрачных покрытий из оксида инди
JPH03232959A (ja) 薄膜の製造方法
Soliman et al. Reactive sputtering of titanium and properties of titanium suboxide films for photochemical applications
CN121802355A (zh) 一种中高熵合金氧化物电致变色器件及其制备方法
Shi et al. Effect of argon to oxygen ratio on the properties of tungsten oxide films prepared by direct current reactive magnetron sputtering
EP1862563A2 (de) Sputterabscheidung von Molybdänschichten

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term