JPS62172731A - エツチング方法 - Google Patents

エツチング方法

Info

Publication number
JPS62172731A
JPS62172731A JP61014152A JP1415286A JPS62172731A JP S62172731 A JPS62172731 A JP S62172731A JP 61014152 A JP61014152 A JP 61014152A JP 1415286 A JP1415286 A JP 1415286A JP S62172731 A JPS62172731 A JP S62172731A
Authority
JP
Japan
Prior art keywords
etching
conductive layer
type conductive
power source
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61014152A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0528898B2 (th
Inventor
Masaki Hirata
平田　雅規
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP61014152A priority Critical patent/JPS62172731A/ja
Publication of JPS62172731A publication Critical patent/JPS62172731A/ja
Publication of JPH0528898B2 publication Critical patent/JPH0528898B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Weting (AREA)
JP61014152A 1986-01-24 1986-01-24 エツチング方法 Granted JPS62172731A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61014152A JPS62172731A (ja) 1986-01-24 1986-01-24 エツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61014152A JPS62172731A (ja) 1986-01-24 1986-01-24 エツチング方法

Publications (2)

Publication Number Publication Date
JPS62172731A true JPS62172731A (ja) 1987-07-29
JPH0528898B2 JPH0528898B2 (th) 1993-04-27

Family

ID=11853176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61014152A Granted JPS62172731A (ja) 1986-01-24 1986-01-24 エツチング方法

Country Status (1)

Country Link
JP (1) JPS62172731A (th)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02290524A (ja) * 1989-01-30 1990-11-30 Dresser Ind Inc 半導体ウエーハ及びその形成法とトランスジューサ及びその製法
US7749868B2 (en) 2005-05-18 2010-07-06 Panasonic Electric Works Co., Ltd. Process of forming a curved profile on a semiconductor substrate
US8313632B2 (en) 2005-05-18 2012-11-20 Panasonic Corporation Process of making an optical lens

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02290524A (ja) * 1989-01-30 1990-11-30 Dresser Ind Inc 半導体ウエーハ及びその形成法とトランスジューサ及びその製法
US7749868B2 (en) 2005-05-18 2010-07-06 Panasonic Electric Works Co., Ltd. Process of forming a curved profile on a semiconductor substrate
US8313632B2 (en) 2005-05-18 2012-11-20 Panasonic Corporation Process of making an optical lens

Also Published As

Publication number Publication date
JPH0528898B2 (th) 1993-04-27

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