JPS62175071U - - Google Patents

Info

Publication number
JPS62175071U
JPS62175071U JP6204986U JP6204986U JPS62175071U JP S62175071 U JPS62175071 U JP S62175071U JP 6204986 U JP6204986 U JP 6204986U JP 6204986 U JP6204986 U JP 6204986U JP S62175071 U JPS62175071 U JP S62175071U
Authority
JP
Japan
Prior art keywords
positive
carbon positive
plasma
negative electrodes
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6204986U
Other languages
English (en)
Japanese (ja)
Other versions
JPS644838Y2 (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6204986U priority Critical patent/JPS644838Y2/ja
Publication of JPS62175071U publication Critical patent/JPS62175071U/ja
Application granted granted Critical
Publication of JPS644838Y2 publication Critical patent/JPS644838Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP6204986U 1986-04-23 1986-04-23 Expired JPS644838Y2 (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6204986U JPS644838Y2 (2) 1986-04-23 1986-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6204986U JPS644838Y2 (2) 1986-04-23 1986-04-23

Publications (2)

Publication Number Publication Date
JPS62175071U true JPS62175071U (2) 1987-11-06
JPS644838Y2 JPS644838Y2 (2) 1989-02-07

Family

ID=30895950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6204986U Expired JPS644838Y2 (2) 1986-04-23 1986-04-23

Country Status (1)

Country Link
JP (1) JPS644838Y2 (2)

Also Published As

Publication number Publication date
JPS644838Y2 (2) 1989-02-07

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