JPS62199664U - - Google Patents
Info
- Publication number
- JPS62199664U JPS62199664U JP8913786U JP8913786U JPS62199664U JP S62199664 U JPS62199664 U JP S62199664U JP 8913786 U JP8913786 U JP 8913786U JP 8913786 U JP8913786 U JP 8913786U JP S62199664 U JPS62199664 U JP S62199664U
- Authority
- JP
- Japan
- Prior art keywords
- light
- light beam
- inspected
- lens system
- condensing lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
第１図はこの考案の一実施例である表面欠陥検
査装置の概略の正面図、第２図はその装置の概略
の斜視図、第３図および第４図はアルミ圧延板の
光学的特性についての説明図、第５図は正反射光
受光方式による従来例の概略の斜視図、第６図お
よび第７図は第５図の従来例による受光の状態を
示す説明図、第８図は正反射光・散乱光の両方を
受光する方式による従来例の概略の斜視図である
。
１７…球面集光レンズ、１７ａ…スリツト、１
８…レーザー発振器、１９…回転ミラー、２０…
ミラー、２１…光電子増倍管。
Fig. 1 is a schematic front view of a surface defect inspection device that is an embodiment of this invention, Fig. 2 is a schematic perspective view of the device, and Figs. 3 and 4 show optical characteristics of a rolled aluminum plate. FIG. 5 is a schematic perspective view of a conventional example using the specular reflection light reception method, FIGS. 6 and 7 are explanatory diagrams showing the state of light reception by the conventional example of FIG. 5, and FIG. FIG. 2 is a schematic perspective view of a conventional example using a method of receiving both reflected light and scattered light. 17... Spherical condenser lens, 17a... Slit, 1
8... Laser oscillator, 19... Rotating mirror, 20...
Mirror, 21...photomultiplier tube.
Claims (1)
光手段と、前記光線の通過を許容する隙間を一部
に有し被検査体表面での上記光線の散乱光を所定
位置に集光する集光レンズ系と、この集光レンズ
系により集光した光を受光して表面欠陥の有無を
検知する信号を出力する受光手段とを備えた表面
欠陥検査装置。 A light projecting means for irradiating a light beam perpendicularly to the surface of the object to be inspected, and a part having a gap that allows the light beam to pass through, condensing the scattered light of the light beam on the surface of the object to be inspected at a predetermined position. A surface defect inspection device comprising a condensing lens system and a light receiving means for receiving light condensed by the condensing lens system and outputting a signal for detecting the presence or absence of a surface defect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8913786U JPS62199664U (en) | 1986-06-10 | 1986-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8913786U JPS62199664U (en) | 1986-06-10 | 1986-06-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62199664U true JPS62199664U (en) | 1987-12-19 |
Family
ID=30947848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8913786U Pending JPS62199664U (en) | 1986-06-10 | 1986-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62199664U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007292770A (en) * | 2006-04-26 | 2007-11-08 | Siemens Ag | Optical sensor for the detection of point, line or planar defects on a smooth surface |
-
1986
- 1986-06-10 JP JP8913786U patent/JPS62199664U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007292770A (en) * | 2006-04-26 | 2007-11-08 | Siemens Ag | Optical sensor for the detection of point, line or planar defects on a smooth surface |
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