JPS62201932U - - Google Patents

Info

Publication number
JPS62201932U
JPS62201932U JP9078586U JP9078586U JPS62201932U JP S62201932 U JPS62201932 U JP S62201932U JP 9078586 U JP9078586 U JP 9078586U JP 9078586 U JP9078586 U JP 9078586U JP S62201932 U JPS62201932 U JP S62201932U
Authority
JP
Japan
Prior art keywords
pin
heater section
treatment apparatus
heat treatment
mounting means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9078586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521875Y2 (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986090785U priority Critical patent/JPH0521875Y2/ja
Publication of JPS62201932U publication Critical patent/JPS62201932U/ja
Application granted granted Critical
Publication of JPH0521875Y2 publication Critical patent/JPH0521875Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986090785U 1986-06-14 1986-06-14 Expired - Lifetime JPH0521875Y2 (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986090785U JPH0521875Y2 (2) 1986-06-14 1986-06-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986090785U JPH0521875Y2 (2) 1986-06-14 1986-06-14

Publications (2)

Publication Number Publication Date
JPS62201932U true JPS62201932U (2) 1987-12-23
JPH0521875Y2 JPH0521875Y2 (2) 1993-06-04

Family

ID=30950968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986090785U Expired - Lifetime JPH0521875Y2 (2) 1986-06-14 1986-06-14

Country Status (1)

Country Link
JP (1) JPH0521875Y2 (2)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737848A (en) * 1980-08-19 1982-03-02 Toshiba Corp Heating apparatus for wafer
JPS5749248A (en) * 1980-09-09 1982-03-23 Fujitsu Ltd Substrate heating and retaining device
JPS6176957U (2) * 1984-10-26 1986-05-23

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737848A (en) * 1980-08-19 1982-03-02 Toshiba Corp Heating apparatus for wafer
JPS5749248A (en) * 1980-09-09 1982-03-23 Fujitsu Ltd Substrate heating and retaining device
JPS6176957U (2) * 1984-10-26 1986-05-23

Also Published As

Publication number Publication date
JPH0521875Y2 (2) 1993-06-04

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