JPS62201937U - - Google Patents
Info
- Publication number
- JPS62201937U JPS62201937U JP1986090515U JP9051586U JPS62201937U JP S62201937 U JPS62201937 U JP S62201937U JP 1986090515 U JP1986090515 U JP 1986090515U JP 9051586 U JP9051586 U JP 9051586U JP S62201937 U JPS62201937 U JP S62201937U
- Authority
- JP
- Japan
- Prior art keywords
- pad
- wafer
- pedestal
- metal foil
- brazed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Description
第１図は本案装置の１例の平面図、第２図はそ
の―線截断面図、第３図はその要部の拡大し
た截断側面図、第４図はそのパツド部分の平面図
である。
１…ウエハ、３…冷却手段、４…台座、５…パ
ツド、５ａ…金属箔、５ｂ…各個所、５ｃ…各中
間部。
Fig. 1 is a plan view of an example of the proposed device, Fig. 2 is a cross-sectional view taken along the line, Fig. 3 is an enlarged cross-sectional side view of its main parts, and Fig. 4 is a plan view of its pad portion. . DESCRIPTION OF SYMBOLS 1...Wafer, 3...Cooling means, 4...Pedestal, 5...Pad, 5a...Metal foil, 5b...Each part, 5c...Each intermediate part.
Claims (1)
を、冷却管その他の冷却手段を有する台座上に、
中間のパツドを介して当接して支承させる式のも
のにおいて、該パツドをアルミニウムその他の金
属箔の１枚或は積層する複数枚で構成させ、これ
を適宜間隔の複数個所において、ろう付、接着そ
の他により該台座側に結着させると共にその各中
間部を略山形に上方に隆起させて成るウエハの支
承装置。 The wafer to be subjected to ion implantation or other vacuum processing is placed on a pedestal equipped with cooling tubes or other cooling means.
In the case of a type in which the pads are abutted and supported through an intermediate pad, the pad is composed of one sheet or a plurality of laminated sheets of aluminum or other metal foil, which are brazed or bonded at multiple locations at appropriate intervals. A wafer support device, which is attached to the pedestal side by other means, and each intermediate portion thereof is raised upward in a substantially chevron shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986090515U JPH0449814Y2 (en) | 1986-06-16 | 1986-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986090515U JPH0449814Y2 (en) | 1986-06-16 | 1986-06-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62201937U true JPS62201937U (en) | 1987-12-23 |
| JPH0449814Y2 JPH0449814Y2 (en) | 1992-11-24 |
Family
ID=30950454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986090515U Expired JPH0449814Y2 (en) | 1986-06-16 | 1986-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0449814Y2 (en) |
-
1986
- 1986-06-16 JP JP1986090515U patent/JPH0449814Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0449814Y2 (en) | 1992-11-24 |
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