JPS6221012Y2 - - Google Patents

Info

Publication number
JPS6221012Y2
JPS6221012Y2 JP1982156509U JP15650982U JPS6221012Y2 JP S6221012 Y2 JPS6221012 Y2 JP S6221012Y2 JP 1982156509 U JP1982156509 U JP 1982156509U JP 15650982 U JP15650982 U JP 15650982U JP S6221012 Y2 JPS6221012 Y2 JP S6221012Y2
Authority
JP
Japan
Prior art keywords
wafer
holding claws
wafer holding
susceptor
shafts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982156509U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5961535U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1982156509U priority Critical patent/JPS5961535U/ja
Publication of JPS5961535U publication Critical patent/JPS5961535U/ja
Application granted granted Critical
Publication of JPS6221012Y2 publication Critical patent/JPS6221012Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
JP1982156509U 1982-10-15 1982-10-15 ウエ−ハ搬送装置 Granted JPS5961535U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982156509U JPS5961535U (ja) 1982-10-15 1982-10-15 ウエ−ハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982156509U JPS5961535U (ja) 1982-10-15 1982-10-15 ウエ−ハ搬送装置

Publications (2)

Publication Number Publication Date
JPS5961535U JPS5961535U (ja) 1984-04-23
JPS6221012Y2 true JPS6221012Y2 (th) 1987-05-28

Family

ID=30345319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982156509U Granted JPS5961535U (ja) 1982-10-15 1982-10-15 ウエ−ハ搬送装置

Country Status (1)

Country Link
JP (1) JPS5961535U (th)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3107310B2 (ja) * 1988-11-30 2000-11-06 東京エレクトロン株式会社 処理装置

Also Published As

Publication number Publication date
JPS5961535U (ja) 1984-04-23

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