JPS626681Y2 - - Google Patents

Info

Publication number
JPS626681Y2
JPS626681Y2 JP1980088533U JP8853380U JPS626681Y2 JP S626681 Y2 JPS626681 Y2 JP S626681Y2 JP 1980088533 U JP1980088533 U JP 1980088533U JP 8853380 U JP8853380 U JP 8853380U JP S626681 Y2 JPS626681 Y2 JP S626681Y2
Authority
JP
Japan
Prior art keywords
wafer sample
pair
wafer
cylindrical body
processing boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980088533U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5712741U (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980088533U priority Critical patent/JPS626681Y2/ja
Publication of JPS5712741U publication Critical patent/JPS5712741U/ja
Application granted granted Critical
Publication of JPS626681Y2 publication Critical patent/JPS626681Y2/ja
Expired legal-status Critical Current

Links

JP1980088533U 1980-06-23 1980-06-23 Expired JPS626681Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980088533U JPS626681Y2 (fr) 1980-06-23 1980-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980088533U JPS626681Y2 (fr) 1980-06-23 1980-06-23

Publications (2)

Publication Number Publication Date
JPS5712741U JPS5712741U (fr) 1982-01-22
JPS626681Y2 true JPS626681Y2 (fr) 1987-02-16

Family

ID=29450608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980088533U Expired JPS626681Y2 (fr) 1980-06-23 1980-06-23

Country Status (1)

Country Link
JP (1) JPS626681Y2 (fr)

Also Published As

Publication number Publication date
JPS5712741U (fr) 1982-01-22

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