JPS6268228U - - Google Patents
Info
- Publication number
- JPS6268228U JPS6268228U JP1985161023U JP16102385U JPS6268228U JP S6268228 U JPS6268228 U JP S6268228U JP 1985161023 U JP1985161023 U JP 1985161023U JP 16102385 U JP16102385 U JP 16102385U JP S6268228 U JPS6268228 U JP S6268228U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- hole
- sample stage
- held
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985161023U JPS6268228U (fr) | 1985-10-18 | 1985-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985161023U JPS6268228U (fr) | 1985-10-18 | 1985-10-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6268228U true JPS6268228U (fr) | 1987-04-28 |
Family
ID=31086956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985161023U Pending JPS6268228U (fr) | 1985-10-18 | 1985-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6268228U (fr) |
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1985
- 1985-10-18 JP JP1985161023U patent/JPS6268228U/ja active Pending