JPS63114038A - イオン注入方法 - Google Patents

イオン注入方法

Info

Publication number
JPS63114038A
JPS63114038A JP61258382A JP25838286A JPS63114038A JP S63114038 A JPS63114038 A JP S63114038A JP 61258382 A JP61258382 A JP 61258382A JP 25838286 A JP25838286 A JP 25838286A JP S63114038 A JPS63114038 A JP S63114038A
Authority
JP
Japan
Prior art keywords
ion
deflection
scanning
electrode
ion beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61258382A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0563897B2 (da
Inventor
Toshiharu Ozawa
小澤　敏晴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP61258382A priority Critical patent/JPS63114038A/ja
Publication of JPS63114038A publication Critical patent/JPS63114038A/ja
Publication of JPH0563897B2 publication Critical patent/JPH0563897B2/ja
Granted legal-status Critical Current

Links

JP61258382A 1986-10-31 1986-10-31 イオン注入方法 Granted JPS63114038A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61258382A JPS63114038A (ja) 1986-10-31 1986-10-31 イオン注入方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61258382A JPS63114038A (ja) 1986-10-31 1986-10-31 イオン注入方法

Publications (2)

Publication Number Publication Date
JPS63114038A true JPS63114038A (ja) 1988-05-18
JPH0563897B2 JPH0563897B2 (da) 1993-09-13

Family

ID=17319465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61258382A Granted JPS63114038A (ja) 1986-10-31 1986-10-31 イオン注入方法

Country Status (1)

Country Link
JP (1) JPS63114038A (da)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006318913A (ja) * 2005-05-14 2006-11-24 Fei Co 帯電粒子ビームの偏向信号補償

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006318913A (ja) * 2005-05-14 2006-11-24 Fei Co 帯電粒子ビームの偏向信号補償

Also Published As

Publication number Publication date
JPH0563897B2 (da) 1993-09-13

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