JPS63126214A - シリコン薄膜の製造法 - Google Patents

シリコン薄膜の製造法

Info

Publication number
JPS63126214A
JPS63126214A JP12356187A JP12356187A JPS63126214A JP S63126214 A JPS63126214 A JP S63126214A JP 12356187 A JP12356187 A JP 12356187A JP 12356187 A JP12356187 A JP 12356187A JP S63126214 A JPS63126214 A JP S63126214A
Authority
JP
Japan
Prior art keywords
gas
thin film
hydrogen
silicon thin
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12356187A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0381296B2 (2
Inventor
Shigeru Iijima
茂 飯島
Kazunobu Tanaka
田中　一宜
Hideyo Ogushi
秀世 大串
Akihisa Matsuda
彰久 松田
Mitsuo Matsumura
松村　光雄
Hideo Yamamoto
英雄 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tonen General Sekiyu KK
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Toa Nenryo Kogyyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Toa Nenryo Kogyyo KK filed Critical Agency of Industrial Science and Technology
Priority to JP12356187A priority Critical patent/JPS63126214A/ja
Publication of JPS63126214A publication Critical patent/JPS63126214A/ja
Publication of JPH0381296B2 publication Critical patent/JPH0381296B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
JP12356187A 1987-05-20 1987-05-20 シリコン薄膜の製造法 Granted JPS63126214A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12356187A JPS63126214A (ja) 1987-05-20 1987-05-20 シリコン薄膜の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12356187A JPS63126214A (ja) 1987-05-20 1987-05-20 シリコン薄膜の製造法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP10111580A Division JPS5727015A (en) 1980-07-25 1980-07-25 Manufacture of silicon thin film

Publications (2)

Publication Number Publication Date
JPS63126214A true JPS63126214A (ja) 1988-05-30
JPH0381296B2 JPH0381296B2 (2) 1991-12-27

Family

ID=14863634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12356187A Granted JPS63126214A (ja) 1987-05-20 1987-05-20 シリコン薄膜の製造法

Country Status (1)

Country Link
JP (1) JPS63126214A (2)

Also Published As

Publication number Publication date
JPH0381296B2 (2) 1991-12-27

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