JPS63155674A - 分布型圧覚センサ - Google Patents

分布型圧覚センサ

Info

Publication number
JPS63155674A
JPS63155674A JP30118186A JP30118186A JPS63155674A JP S63155674 A JPS63155674 A JP S63155674A JP 30118186 A JP30118186 A JP 30118186A JP 30118186 A JP30118186 A JP 30118186A JP S63155674 A JPS63155674 A JP S63155674A
Authority
JP
Japan
Prior art keywords
pressure sensor
crystal silicon
distributed pressure
single crystal
silicon plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP30118186A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0558675B2 (th
Inventor
Mitsuo Kobayashi
光男 小林
Shinobu Sagisawa
鷺沢　忍
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP30118186A priority Critical patent/JPS63155674A/ja
Publication of JPS63155674A publication Critical patent/JPS63155674A/ja
Publication of JPH0558675B2 publication Critical patent/JPH0558675B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
JP30118186A 1986-12-19 1986-12-19 分布型圧覚センサ Granted JPS63155674A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30118186A JPS63155674A (ja) 1986-12-19 1986-12-19 分布型圧覚センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30118186A JPS63155674A (ja) 1986-12-19 1986-12-19 分布型圧覚センサ

Publications (2)

Publication Number Publication Date
JPS63155674A true JPS63155674A (ja) 1988-06-28
JPH0558675B2 JPH0558675B2 (th) 1993-08-27

Family

ID=17893753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30118186A Granted JPS63155674A (ja) 1986-12-19 1986-12-19 分布型圧覚センサ

Country Status (1)

Country Link
JP (1) JPS63155674A (th)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0267936A (ja) * 1988-07-14 1990-03-07 Blomberg Robotertecknik Gmbh 触覚センサ
JPH02223835A (ja) * 1989-02-27 1990-09-06 Agency Of Ind Science & Technol 分布型圧覚センサ
JPH03113334A (ja) * 1989-09-28 1991-05-14 Fuji Electric Corp Res & Dev Ltd 接触覚センサ
JP2006275979A (ja) * 2005-03-30 2006-10-12 National Institute Of Information & Communication Technology センサ素子、センサ装置、対象物移動制御装置、対象物判別装置
JP2016506520A (ja) * 2012-12-24 2016-03-03 フレセニウス メディカル ケア ホールディングス インコーポレーテッド 透析装置リザーバのための荷重懸架及び計量システム

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0267936A (ja) * 1988-07-14 1990-03-07 Blomberg Robotertecknik Gmbh 触覚センサ
JPH02223835A (ja) * 1989-02-27 1990-09-06 Agency Of Ind Science & Technol 分布型圧覚センサ
JPH03113334A (ja) * 1989-09-28 1991-05-14 Fuji Electric Corp Res & Dev Ltd 接触覚センサ
JP2006275979A (ja) * 2005-03-30 2006-10-12 National Institute Of Information & Communication Technology センサ素子、センサ装置、対象物移動制御装置、対象物判別装置
JP2016506520A (ja) * 2012-12-24 2016-03-03 フレセニウス メディカル ケア ホールディングス インコーポレーテッド 透析装置リザーバのための荷重懸架及び計量システム

Also Published As

Publication number Publication date
JPH0558675B2 (th) 1993-08-27

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term