JPS63197332U - - Google Patents
Info
- Publication number
- JPS63197332U JPS63197332U JP8747887U JP8747887U JPS63197332U JP S63197332 U JPS63197332 U JP S63197332U JP 8747887 U JP8747887 U JP 8747887U JP 8747887 U JP8747887 U JP 8747887U JP S63197332 U JPS63197332 U JP S63197332U
- Authority
- JP
- Japan
- Prior art keywords
- frequency power
- utility
- low
- model registration
- dry etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は、本考案の一実施例の概略図である。
１……低周波数電源、２……高周波数電源、３
……低周波用整合装置、４……高周波用整合装置
、５……切換え器、６……電極、７……ウエハ。
……低周波用整合装置、４……高周波用整合装置
、５……切換え器、６……電極、７……ウエハ。
Claims (1)
- 【実用新案登録請求の範囲】 １ 二つの周波数の違う高周波電源を設けたこと
を特徴とする低ダメージドライエツチング装置。 ２ 上記高周波電源をエツチング終点近くで切換
えるように構成した実用新案登録請求の範囲第１
項記載の低ダメージドライエツチング装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8747887U JPS63197332U (ja) | 1987-06-08 | 1987-06-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8747887U JPS63197332U (ja) | 1987-06-08 | 1987-06-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63197332U true JPS63197332U (ja) | 1988-12-19 |
Family
ID=30944728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8747887U Pending JPS63197332U (ja) | 1987-06-08 | 1987-06-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63197332U (ja) |
-
1987
- 1987-06-08 JP JP8747887U patent/JPS63197332U/ja active Pending
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