JPS63274657A - 酸化物超電導材料およびその作製方法 - Google Patents

酸化物超電導材料およびその作製方法

Info

Publication number: JPS63274657A
Authority: JP; Japan
Prior art keywords: superconducting material; oxygen; superconductive material; oxide superconducting; fluorine
Prior art date: 1987-05-06
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP62111615A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0579605B2 (de

Inventor

Shunpei Yamazaki

舜平山崎

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Semiconductor Energy Laboratory Co Ltd

Original Assignee

Semiconductor Energy Laboratory Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-05-06

Filing date

1987-05-06

Publication date

1988-11-11

1987-05-06 Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd

1987-05-06 Priority to JP62111615A priority Critical patent/JPS63274657A/ja

1988-11-11 Publication of JPS63274657A publication Critical patent/JPS63274657A/ja

1993-11-04 Publication of JPH0579605B2 publication Critical patent/JPH0579605B2/ja

Status Granted legal-status Critical Current

Links

239000000463 material Substances 0.000 title claims abstract description 54
239000001301 oxygen Substances 0.000 claims abstract description 30
229910052760 oxygen Inorganic materials 0.000 claims abstract description 30
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 29
229910052736 halogen Inorganic materials 0.000 claims abstract description 17
150000002367 halogens Chemical class 0.000 claims abstract description 17
230000000737 periodic effect Effects 0.000 claims abstract description 7
239000011737 fluorine Substances 0.000 claims description 19
229910052731 fluorine Inorganic materials 0.000 claims description 19
125000001153 fluoro group Chemical group F* 0.000 claims 1
229910052693 Europium Inorganic materials 0.000 abstract description 2
229910052688 Gadolinium Inorganic materials 0.000 abstract description 2
229910052771 Terbium Inorganic materials 0.000 abstract description 2
229910052788 barium Inorganic materials 0.000 abstract description 2
229910052791 calcium Inorganic materials 0.000 abstract description 2
229910052749 magnesium Inorganic materials 0.000 abstract description 2
229910052712 strontium Inorganic materials 0.000 abstract description 2
229910052727 yttrium Inorganic materials 0.000 abstract description 2
229910052769 Ytterbium Inorganic materials 0.000 abstract 1
238000004321 preservation Methods 0.000 abstract 1
YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 18
239000010408 film Substances 0.000 description 11
238000000034 method Methods 0.000 description 9
230000006866 deterioration Effects 0.000 description 5
238000005468 ion implantation Methods 0.000 description 5
239000010409 thin film Substances 0.000 description 5
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
238000010438 heat treatment Methods 0.000 description 3
239000007788 liquid Substances 0.000 description 3
238000004519 manufacturing process Methods 0.000 description 3
239000011575 calcium Substances 0.000 description 2
238000005229 chemical vapour deposition Methods 0.000 description 2
239000010949 copper Substances 0.000 description 2
239000013078 crystal Substances 0.000 description 2
238000009826 distribution Methods 0.000 description 2
239000011777 magnesium Substances 0.000 description 2
229910052751 metal Inorganic materials 0.000 description 2
239000002184 metal Substances 0.000 description 2
229910052757 nitrogen Inorganic materials 0.000 description 2
239000007858 starting material Substances 0.000 description 2
239000002887 superconductor Substances 0.000 description 2
ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 1
239000005751 Copper oxide Substances 0.000 description 1
229910052692 Dysprosium Inorganic materials 0.000 description 1
229910052691 Erbium Inorganic materials 0.000 description 1
KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
229910052689 Holmium Inorganic materials 0.000 description 1
229910002319 LaF3 Inorganic materials 0.000 description 1
229910052765 Lutetium Inorganic materials 0.000 description 1
FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
229910052581 Si3N4 Inorganic materials 0.000 description 1
229910052775 Thulium Inorganic materials 0.000 description 1
229910052768 actinide Inorganic materials 0.000 description 1
150000001255 actinides Chemical class 0.000 description 1
239000000654 additive Substances 0.000 description 1
239000003570 air Substances 0.000 description 1
DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
AYJRCSIUFZENHW-DEQYMQKBSA-L barium(2+);oxomethanediolate Chemical compound [Ba+2].[O-][14C]([O-])=O AYJRCSIUFZENHW-DEQYMQKBSA-L 0.000 description 1
229910052790 beryllium Inorganic materials 0.000 description 1
ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
229910052794 bromium Inorganic materials 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
150000001875 compounds Chemical class 0.000 description 1
239000004020 conductor Substances 0.000 description 1
229910052802 copper Inorganic materials 0.000 description 1
229910000431 copper oxide Inorganic materials 0.000 description 1
230000002950 deficient Effects 0.000 description 1
238000010586 diagram Methods 0.000 description 1
KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 description 1
230000000694 effects Effects 0.000 description 1
UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 description 1
UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
239000007789 gas Substances 0.000 description 1
229910052737 gold Inorganic materials 0.000 description 1
239000010931 gold Substances 0.000 description 1
239000001307 helium Substances 0.000 description 1
229910052734 helium Inorganic materials 0.000 description 1
SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
KJZYNXUDTRRSPN-UHFFFAOYSA-N holmium atom Chemical compound [Ho] KJZYNXUDTRRSPN-UHFFFAOYSA-N 0.000 description 1
229910003437 indium oxide Inorganic materials 0.000 description 1
PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
239000011261 inert gas Substances 0.000 description 1
229910052740 iodine Inorganic materials 0.000 description 1
239000011630 iodine Substances 0.000 description 1
229910052747 lanthanoid Inorganic materials 0.000 description 1
150000002602 lanthanoids Chemical class 0.000 description 1
OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
150000002926 oxygen Chemical class 0.000 description 1
238000006213 oxygenation reaction Methods 0.000 description 1
238000002161 passivation Methods 0.000 description 1
230000000704 physical effect Effects 0.000 description 1
229910052705 radium Inorganic materials 0.000 description 1
HCWPIIXVSYCSAN-UHFFFAOYSA-N radium atom Chemical compound [Ra] HCWPIIXVSYCSAN-UHFFFAOYSA-N 0.000 description 1
229910052706 scandium Inorganic materials 0.000 description 1
SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
238000007650 screen-printing Methods 0.000 description 1
230000035936 sexual power Effects 0.000 description 1
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
239000002356 single layer Substances 0.000 description 1
238000005477 sputtering target Methods 0.000 description 1
CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
BYMUNNMMXKDFEZ-UHFFFAOYSA-K trifluorolanthanum Chemical compound F[La](F)F BYMUNNMMXKDFEZ-UHFFFAOYSA-K 0.000 description 1
239000012808 vapor phase Substances 0.000 description 1
VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1

Classifications

- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

Compositions Of Oxide Ceramics (AREA)
Inorganic Compounds Of Heavy Metals (AREA)
Superconductors And Manufacturing Methods Therefor (AREA)

JP62111615A 1987-05-06 1987-05-06 酸化物超電導材料およびその作製方法 Granted JPS63274657A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP62111615A JPS63274657A (ja)	1987-05-06	1987-05-06	酸化物超電導材料およびその作製方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP62111615A JPS63274657A (ja)	1987-05-06	1987-05-06	酸化物超電導材料およびその作製方法

Related Child Applications (1)

Application Number	Title	Priority Date	Filing Date
JP3094823A Division JP2709379B2 (ja)	1991-04-01	1991-04-01	酸化物超電導材料用劣化防止膜

Publications (2)

Publication Number	Publication Date
JPS63274657A true JPS63274657A (ja)	1988-11-11
JPH0579605B2 JPH0579605B2 (de)	1993-11-04

Family

ID=14565822

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP62111615A Granted JPS63274657A (ja)	1987-05-06	1987-05-06	酸化物超電導材料およびその作製方法

Country Status (1)

Country	Link
JP (1)	JPS63274657A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0259467A (ja) *	1988-04-01	1990-02-28	Rhone Poulenc Chim	安定した超電導物質とその製造方法
US5607658A (en) *	1992-09-29	1997-03-04	Canon Kabushiki Kaisha	Method of manufacturing metallic oxide and metallic oxide manufactured by the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS63233066A (ja) *	1987-03-20	1988-09-28	Fujikura Ltd	超電導体の製造方法
JPS63241825A (ja) *	1987-03-30	1988-10-07	Fujikura Ltd	超電導体の製造方法
JPS63241824A (ja) *	1987-03-30	1988-10-07	Fujikura Ltd	超電導体の製造方法

1987
- 1987-05-06 JP JP62111615A patent/JPS63274657A/ja active Granted

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS63233066A (ja) *	1987-03-20	1988-09-28	Fujikura Ltd	超電導体の製造方法
JPS63241825A (ja) *	1987-03-30	1988-10-07	Fujikura Ltd	超電導体の製造方法
JPS63241824A (ja) *	1987-03-30	1988-10-07	Fujikura Ltd	超電導体の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0259467A (ja) *	1988-04-01	1990-02-28	Rhone Poulenc Chim	安定した超電導物質とその製造方法
US5607658A (en) *	1992-09-29	1997-03-04	Canon Kabushiki Kaisha	Method of manufacturing metallic oxide and metallic oxide manufactured by the same

Also Published As

Publication number	Publication date
JPH0579605B2 (de)	1993-11-04

Publication	Publication Date	Title
US4916116A (en)	1990-04-10	Method of adding a halogen element into oxide superconducting materials by ion injection
JP2567460B2 (ja)	1996-12-25	超伝導薄膜とその作製方法
US4925829A (en)	1990-05-15	Method for preparing thin film of compound oxide superconductor by ion beam techniques
CN1034285A (zh)	1989-07-26	形成超导氧化物材料的方法和装置
Neugebauer et al.	1964	Vapor‐Deposited Superconductive Films of Nb, Ta, and V
US4959345A (en)	1990-09-25	Method of adding oxygen into oxide superconducting materials by ion injection
JPS63261770A (ja)	1988-10-28	酸化物超電導材料の作製方法
JPS63274657A (ja)	1988-11-11	酸化物超電導材料およびその作製方法
EP0337699A2 (de)	1989-10-18	Isolierende oxidische Zusammensetzung zur Verwendung in einer supraleitenden Anordnung
JPH02167820A (ja)	1990-06-28	Ｔ１系複合酸化物超電導体薄膜の成膜方法
JPH0440284B2 (de)	1992-07-02
JPS63261769A (ja)	1988-10-28	酸化物超電導材料の作製方法
JPH0817253B2 (ja)	1996-02-21	酸化物超伝導膜形成方法
JPH0517272A (ja)	1993-01-26	酸化物超電導材料用劣化防止膜
Peng et al.	1993	Low‐energy oxygen ion bombardment effect on BaTiO3 thin films grown by multi‐ion‐beam reactive sputtering technique
JP2502344B2 (ja)	1996-05-29	複合酸化物超電導体薄膜の作製方法
US5137868A (en)	1992-08-11	Method for preparing a superconducting device
US5232903A (en)	1993-08-03	Oxide superconducting device having uniform oxygen concentration
US6441394B2 (en)	2002-08-27	Intrinsic Josephson superconducting tunnel junction device
JPH0662359B2 (ja)	1994-08-17	超電導材料の作製方法
JPH01203203A (ja)	1989-08-16	超伝導材料層の形成方法
JP2529347B2 (ja)	1996-08-28	超電導薄膜の作製方法
JPS63301426A (ja)	1988-12-08	超電導材料の作製方法
JPH01111718A (ja)	1989-04-28	超電導薄膜の形成方法
EP0442210B1 (de)	1996-03-06	Bi Oxid-Supraleiter

JPS63274657A - 酸化物超電導材料およびその作製方法 - Google Patents

Info

Links

Classifications

Landscapes

Priority Applications (1)

Applications Claiming Priority (1)

Related Child Applications (1)

Publications (2)

Family

ID=14565822

Family Applications (1)

Country Status (1)

Cited By (2)

Citations (3)

Patent Citations (3)

Cited By (2)

Also Published As

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