JPS6335598U - - Google Patents

Info

Publication number
JPS6335598U
JPS6335598U JP12947886U JP12947886U JPS6335598U JP S6335598 U JPS6335598 U JP S6335598U JP 12947886 U JP12947886 U JP 12947886U JP 12947886 U JP12947886 U JP 12947886U JP S6335598 U JPS6335598 U JP S6335598U
Authority
JP
Japan
Prior art keywords
robot arm
resistance layers
type
diffused resistance
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12947886U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12947886U priority Critical patent/JPS6335598U/ja
Publication of JPS6335598U publication Critical patent/JPS6335598U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の平面図（一部断面
図）、第２図は本考案の実施例の応力検出部平面
図を示す。 １…半導体ゲージ、２…ロボツト指部、３…ロ
ボツト手首部、４…ｎ型拡散抵抗層、５…ｐ型拡
散抵抗層、６…半導体基板、７…電極、８…外部
端子、９…ベース。

Claims (1)

    【実用新案登録請求の範囲】
  1. 力覚として力センサを内蔵したロボツトアーム
    において、半導体基板内にｐ型とｎ型の拡散抵抗
    層を形成し、前記両拡散抵抗層の組合せからなる
    ひずみゲージを一組の拡散ゲージとして持つ半導
    体ひずみゲージを力センサとして使用したことを
    特徴とするロボツトアーム。
JP12947886U 1986-08-27 1986-08-27 Pending JPS6335598U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12947886U JPS6335598U (ja) 1986-08-27 1986-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12947886U JPS6335598U (ja) 1986-08-27 1986-08-27

Publications (1)

Publication Number Publication Date
JPS6335598U true JPS6335598U (ja) 1988-03-07

Family

ID=31026082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12947886U Pending JPS6335598U (ja) 1986-08-27 1986-08-27

Country Status (1)

Country Link
JP (1) JPS6335598U (ja)

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