JPS6343637U - - Google Patents
Info
- Publication number
- JPS6343637U JPS6343637U JP13789986U JP13789986U JPS6343637U JP S6343637 U JPS6343637 U JP S6343637U JP 13789986 U JP13789986 U JP 13789986U JP 13789986 U JP13789986 U JP 13789986U JP S6343637 U JPS6343637 U JP S6343637U
- Authority
- JP
- Japan
- Prior art keywords
- ceramic raw
- manufacturing
- silane gas
- raw material
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 2
- 229910000077 silane Inorganic materials 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Carbon And Carbon Compounds (AREA)
Description
第１図は本考案装置を用いた水素を循環使用す
る窒化硅素セラミツクス原料製造プロセスを示す
フローシート、第２図は本考案装置を用いた水素
を循環使用する炭化硅素セラミツクス原料製造プ
ロセスを示すフローシートである。
る窒化硅素セラミツクス原料製造プロセスを示す
フローシート、第２図は本考案装置を用いた水素
を循環使用する炭化硅素セラミツクス原料製造プ
ロセスを示すフローシートである。
Claims (1)
- シランガスを使つてセラミツクス原料を製造す
るプロセスで発生する水素を、シランガス製造の
ための水素源として循環使用するように構成して
なることを特徴とするセラミツクス原料製造装置
。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13789986U JPS6343637U (ja) | 1986-09-10 | 1986-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13789986U JPS6343637U (ja) | 1986-09-10 | 1986-09-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6343637U true JPS6343637U (ja) | 1988-03-23 |
Family
ID=31042384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13789986U Pending JPS6343637U (ja) | 1986-09-10 | 1986-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6343637U (ja) |
-
1986
- 1986-09-10 JP JP13789986U patent/JPS6343637U/ja active Pending
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