JPS6362095B2 - - Google Patents

Info

Publication number
JPS6362095B2
JPS6362095B2 JP56167388A JP16738881A JPS6362095B2 JP S6362095 B2 JPS6362095 B2 JP S6362095B2 JP 56167388 A JP56167388 A JP 56167388A JP 16738881 A JP16738881 A JP 16738881A JP S6362095 B2 JPS6362095 B2 JP S6362095B2
Authority
JP
Japan
Prior art keywords
gas
semiconductor crystal
insulating film
reaction tube
phosphoryl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56167388A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5868935A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP56167388A priority Critical patent/JPS5868935A/ja
Publication of JPS5868935A publication Critical patent/JPS5868935A/ja
Publication of JPS6362095B2 publication Critical patent/JPS6362095B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials

Landscapes

  • Formation Of Insulating Films (AREA)
JP56167388A 1981-10-20 1981-10-20 半導体結晶上への絶縁膜の形成法 Granted JPS5868935A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56167388A JPS5868935A (ja) 1981-10-20 1981-10-20 半導体結晶上への絶縁膜の形成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56167388A JPS5868935A (ja) 1981-10-20 1981-10-20 半導体結晶上への絶縁膜の形成法

Publications (2)

Publication Number Publication Date
JPS5868935A JPS5868935A (ja) 1983-04-25
JPS6362095B2 true JPS6362095B2 (2) 1988-12-01

Family

ID=15848774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56167388A Granted JPS5868935A (ja) 1981-10-20 1981-10-20 半導体結晶上への絶縁膜の形成法

Country Status (1)

Country Link
JP (1) JPS5868935A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0535094U (ja) * 1991-10-14 1993-05-14 敦子 加川 カバー付き物干し器

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006321564A (ja) * 2006-06-21 2006-11-30 Denki Kagaku Kogyo Kk 熱可塑性樹脂シート

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0535094U (ja) * 1991-10-14 1993-05-14 敦子 加川 カバー付き物干し器

Also Published As

Publication number Publication date
JPS5868935A (ja) 1983-04-25

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