JPS6378067U - - Google Patents
Info
- Publication number
- JPS6378067U JPS6378067U JP17381886U JP17381886U JPS6378067U JP S6378067 U JPS6378067 U JP S6378067U JP 17381886 U JP17381886 U JP 17381886U JP 17381886 U JP17381886 U JP 17381886U JP S6378067 U JPS6378067 U JP S6378067U
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- evaporation source
- crystal resonator
- vacuum
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 4
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は、この考案の一実施例に係る真空蒸着
装置を示す概略図である。第２図は、この考案の
他の実施例に係る真空蒸着装置を示す概略図であ
る。第３図は、従来の真空蒸着装置の一例を示す
概略図である。
２…蒸発源、１０…蒸気、１６…水晶振動子、
２０…スリツト板、２０ａ…スリツト、２２…駆
動装置、２４…メツシユ、２６…巻取り装置。
FIG. 1 is a schematic diagram showing a vacuum evaporation apparatus according to an embodiment of this invention. FIG. 2 is a schematic diagram showing a vacuum evaporation apparatus according to another embodiment of this invention. FIG. 3 is a schematic diagram showing an example of a conventional vacuum evaporation apparatus. 2... Evaporation source, 10... Steam, 16... Crystal resonator,
20... Slit plate, 20a... Slit, 22... Drive device, 24... Mesh, 26... Winding device.
Claims (1)
させる装置であつて当該蒸気が入射する位置に水
晶式膜厚計を構成する水晶振動子を有するものに
おいて、蒸発源と水晶振動子との間に、部分的に
開口している遮蔽手段を設けたことを特徴とする
真空蒸着装置。 In an apparatus for depositing vapor from an evaporation source onto a substrate in a vacuum atmosphere, and having a crystal resonator constituting a crystal film thickness meter at the position where the vapor is incident, there is a gap between the evaporation source and the crystal resonator. A vacuum evaporation apparatus characterized in that a shielding means that is partially open is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17381886U JPS6378067U (en) | 1986-11-12 | 1986-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17381886U JPS6378067U (en) | 1986-11-12 | 1986-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6378067U true JPS6378067U (en) | 1988-05-24 |
Family
ID=31111638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17381886U Pending JPS6378067U (en) | 1986-11-12 | 1986-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6378067U (en) |
-
1986
- 1986-11-12 JP JP17381886U patent/JPS6378067U/ja active Pending
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