JPS6410236A - Pattern forming material - Google Patents
Pattern forming materialInfo
- Publication number
- JPS6410236A JPS6410236A JP62165762A JP16576287A JPS6410236A JP S6410236 A JPS6410236 A JP S6410236A JP 62165762 A JP62165762 A JP 62165762A JP 16576287 A JP16576287 A JP 16576287A JP S6410236 A JPS6410236 A JP S6410236A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- acridine
- derivative
- maleimide
- pattern forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
Abstract
PURPOSE:To improve the characteristic of a negative type resist against a DUV light or an excimer laser, by incorporating acridine or its derivative in a novolak resin or a phenolic resin or a maleimide resin. CONSTITUTION:The titled material is composed of a pattern forming material contg. the novolak resin or the phenolic resin or the maleimide resin and the acridine or its derivative. Namely, in case that the acridine or its derivative is mixed with the novolak resin, the phenolic resin or the maleimide resin, and the obtd. mixture is irradiated by the DUV light or the excimer laser, the acridine or its derivative acts as a crosslinking agent of said resin, thereby improving the sensitivity and the resolution of the titled material as the negative resist of the resin. The compounding amount of the acridine or its derivative to the resin is sufficient to be about 1wt.% to display the additional effect of said compd. Thus, the fine workability and the productivity of the titled material are improved in the production of a semiconductor apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62165762A JPS6410236A (en) | 1987-07-02 | 1987-07-02 | Pattern forming material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62165762A JPS6410236A (en) | 1987-07-02 | 1987-07-02 | Pattern forming material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6410236A true JPS6410236A (en) | 1989-01-13 |
Family
ID=15818561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62165762A Pending JPS6410236A (en) | 1987-07-02 | 1987-07-02 | Pattern forming material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6410236A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01284849A (en) * | 1988-05-12 | 1989-11-16 | Fuji Photo Film Co Ltd | Photosensitive composition |
| JPH07333038A (en) * | 1994-06-03 | 1995-12-22 | Endress & Hauser Gmbh & Co | Device for detecting and/or monitoring specified filled state in container |
-
1987
- 1987-07-02 JP JP62165762A patent/JPS6410236A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01284849A (en) * | 1988-05-12 | 1989-11-16 | Fuji Photo Film Co Ltd | Photosensitive composition |
| JPH07333038A (en) * | 1994-06-03 | 1995-12-22 | Endress & Hauser Gmbh & Co | Device for detecting and/or monitoring specified filled state in container |
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