JPS641113A - Production of thin film magnetic head - Google Patents
Production of thin film magnetic headInfo
- Publication number
- JPS641113A JPS641113A JP15581687A JP15581687A JPS641113A JP S641113 A JPS641113 A JP S641113A JP 15581687 A JP15581687 A JP 15581687A JP 15581687 A JP15581687 A JP 15581687A JP S641113 A JPS641113 A JP S641113A
- Authority
- JP
- Japan
- Prior art keywords
- film
- sio
- insulating layer
- thin
- thin ferromagnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title abstract 3
- 239000010409 thin film Substances 0.000 title abstract 2
- 239000010408 film Substances 0.000 abstract 14
- 230000005294 ferromagnetic effect Effects 0.000 abstract 6
- 229910045601 alloy Inorganic materials 0.000 abstract 3
- 239000000956 alloy Substances 0.000 abstract 3
- 229910003271 Ni-Fe Inorganic materials 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000004020 conductor Substances 0.000 abstract 2
- 238000010030 laminating Methods 0.000 abstract 2
- 229910018182 Al—Cu Inorganic materials 0.000 abstract 1
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 238000010301 surface-oxidation reaction Methods 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15581687A JPS641113A (en) | 1987-06-22 | 1987-06-22 | Production of thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15581687A JPS641113A (en) | 1987-06-22 | 1987-06-22 | Production of thin film magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH011113A JPH011113A (ja) | 1989-01-05 |
| JPS641113A true JPS641113A (en) | 1989-01-05 |
Family
ID=15614103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15581687A Pending JPS641113A (en) | 1987-06-22 | 1987-06-22 | Production of thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS641113A (ja) |
-
1987
- 1987-06-22 JP JP15581687A patent/JPS641113A/ja active Pending
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