JPS6419731A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number: JPS6419731A
Authority: JP; Japan
Prior art keywords: layer; resist; type; epitaxially grown; inp
Prior art date: 1987-07-15
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP17471887A

Other languages

English (en)

Inventor

Emiko Yoshinari

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

NEC Corp

Original Assignee

NEC Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-07-15

Filing date

1987-07-15

Publication date

1989-01-23

1987-07-15 Application filed by NEC Corp filed Critical NEC Corp

1987-07-15 Priority to JP17471887A priority Critical patent/JPS6419731A/ja

1989-01-23 Publication of JPS6419731A publication Critical patent/JPS6419731A/ja

Status Pending legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title 1
239000004065 semiconductor Substances 0.000 title 1
238000005530 etching Methods 0.000 abstract 2
238000000034 method Methods 0.000 abstract 2
GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract 1
238000004140 cleaning Methods 0.000 abstract 1
229910017604 nitric acid Inorganic materials 0.000 abstract 1
239000000758 substrate Substances 0.000 abstract 1

Landscapes

Weting (AREA)

JP17471887A 1987-07-15 1987-07-15 Manufacture of semiconductor device Pending JPS6419731A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP17471887A JPS6419731A (en)	1987-07-15	1987-07-15	Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP17471887A JPS6419731A (en)	1987-07-15	1987-07-15	Manufacture of semiconductor device

Publications (1)

Publication Number	Publication Date
JPS6419731A true JPS6419731A (en)	1989-01-23

Family

ID=15983434

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP17471887A Pending JPS6419731A (en)	1987-07-15	1987-07-15	Manufacture of semiconductor device

Country Status (1)

Country	Link
JP (1)	JPS6419731A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH08316219A (ja) *	1995-05-19	1996-11-29	Nec Corp	半導体装置の製造方法

1987
- 1987-07-15 JP JP17471887A patent/JPS6419731A/ja active Pending

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH08316219A (ja) *	1995-05-19	1996-11-29	Nec Corp	半導体装置の製造方法

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