JPS642075U - - Google Patents

Info

Publication number
JPS642075U
JPS642075U JP9316387U JP9316387U JPS642075U JP S642075 U JPS642075 U JP S642075U JP 9316387 U JP9316387 U JP 9316387U JP 9316387 U JP9316387 U JP 9316387U JP S642075 U JPS642075 U JP S642075U
Authority
JP
Japan
Prior art keywords
substrate
groove
sealed tube
substrate support
cylindrical member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9316387U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9316387U priority Critical patent/JPS642075U/ja
Publication of JPS642075U publication Critical patent/JPS642075U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Description

【図面の簡単な説明】
第１図は本考案の液相エピタキシヤル成長装置
の基板支持具を示す斜視図、第２図は従来の液相
エピタキシヤル成長装置の断面図、第３図は従来
の基板支持具の斜視図である。 図に於いて、１１は基板支持具、１２は枠状部
材、１３は溝を示す。

Claims (1)

  1. 【実用新案登録請求の範囲】 エピタキシヤル成長基板６を支持する基板支持
    具５が嵌合される溝４を有する円柱状部材２と、
    該円柱状部材が挿入される封管１と、該封管内に
    充填されるエピタキシヤル層形成材料７とよりな
    る成長装置に於いて、 前記基板支持具１１がコの字状で前記基板６が
    挿入される溝１３が内周面に設けられた枠状部材
    １２にて形成されていることを特徴とする液相エ
    ピタキシヤル成長装置。
JP9316387U 1987-06-16 1987-06-16 Pending JPS642075U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9316387U JPS642075U (ja) 1987-06-16 1987-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9316387U JPS642075U (ja) 1987-06-16 1987-06-16

Publications (1)

Publication Number Publication Date
JPS642075U true JPS642075U (ja) 1989-01-09

Family

ID=30955506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9316387U Pending JPS642075U (ja) 1987-06-16 1987-06-16

Country Status (1)

Country Link
JP (1) JPS642075U (ja)

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