JPS642366A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS642366A
JPS642366A JP62158231A JP15823187A JPS642366A JP S642366 A JPS642366 A JP S642366A JP 62158231 A JP62158231 A JP 62158231A JP 15823187 A JP15823187 A JP 15823187A JP S642366 A JPS642366 A JP S642366A
Authority
JP
Japan
Prior art keywords
gate
sidewall
under
diffusion layers
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62158231A
Other languages
English (en)
Other versions
JPH012366A (ja
Inventor
Kiyoyuki Morita
Shohei Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62158231A priority Critical patent/JPS642366A/ja
Publication of JPH012366A publication Critical patent/JPH012366A/ja
Publication of JPS642366A publication Critical patent/JPS642366A/ja
Pending legal-status Critical Current

Links

JP62158231A 1987-06-25 1987-06-25 Manufacture of semiconductor device Pending JPS642366A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62158231A JPS642366A (en) 1987-06-25 1987-06-25 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62158231A JPS642366A (en) 1987-06-25 1987-06-25 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPH012366A JPH012366A (ja) 1989-01-06
JPS642366A true JPS642366A (en) 1989-01-06

Family

ID=15667141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62158231A Pending JPS642366A (en) 1987-06-25 1987-06-25 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS642366A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02177442A (ja) * 1988-12-28 1990-07-10 Ricoh Co Ltd 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02177442A (ja) * 1988-12-28 1990-07-10 Ricoh Co Ltd 半導体装置の製造方法

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