JPS6426832U - - Google Patents

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Publication number
JPS6426832U
JPS6426832U JP12125987U JP12125987U JPS6426832U JP S6426832 U JPS6426832 U JP S6426832U JP 12125987 U JP12125987 U JP 12125987U JP 12125987 U JP12125987 U JP 12125987U JP S6426832 U JPS6426832 U JP S6426832U
Authority
JP
Japan
Prior art keywords
pressure
pump
gas phase
reduced
pump system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12125987U
Other languages
Japanese (ja)
Other versions
JPH0729626Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987121259U priority Critical patent/JPH0729626Y2/en
Publication of JPS6426832U publication Critical patent/JPS6426832U/ja
Application granted granted Critical
Publication of JPH0729626Y2 publication Critical patent/JPH0729626Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of the drawing]

２……反応炉、３……パージガス、１０……タ
ーボ分子ポンプ（第１のポンプ）、１１……エグ
ゼクタポンプ（第２のポンプ）。 2... Reactor, 3... Purge gas, 10... Turbomolecular pump (first pump), 11... Executor pump (second pump).

補正 昭６２．１０．２２ 図面の簡単な説明を次のように補正する。Correction: 1986.10.22 The brief description of the drawing has been amended as follows.

【図面の簡単な説明】 第１図は、本考案の減圧気相処理装置の一実施
例の構成を示す概略図、第２図は、従来の減圧気
相処理装置の一例の構成を示す概略図、第３図は
、従来の減圧気相処理装置の他の一例の構成を示
す概略図である。 ２……反応炉、３……パージガス、１０……タ
ーボ分子ポンプ（第１のポンプ）、１１……エグ
ゼクタポンプ（第２のポンプ）。[BRIEF DESCRIPTION OF THE DRAWINGS] FIG. 1 is a schematic diagram showing the configuration of an embodiment of the reduced pressure vapor phase treatment apparatus of the present invention, and FIG. 2 is a schematic diagram showing the configuration of an example of the conventional reduced pressure gas phase treatment apparatus. 3 are schematic diagrams showing the configuration of another example of a conventional reduced pressure vapor phase treatment apparatus. 2... Reactor, 3... Purge gas, 10... Turbomolecular pump (first pump), 11... Executor pump (second pump).

Claims (1)

【実用新案登録請求の範囲】 ポンプシステムを備えた減圧気相処理装置にお
いて、 前記ポンプシステムを、少なくともほぼ大気圧
から反応炉内の圧力より低い圧力まで減圧を行う
第１のポンプと、 パージガスを合流させる第２のポンプとを直列
に接続して構成したことを特徴とする減圧気相処
理装置。[Claims for Utility Model Registration] A reduced pressure gas phase treatment apparatus equipped with a pump system, comprising: a first pump that reduces the pressure of the pump system from at least approximately atmospheric pressure to a pressure lower than the pressure within the reactor; and a purge gas. A reduced-pressure gas phase processing apparatus characterized in that it is configured by connecting in series a second pump for merging.
JP1987121259U 1987-08-07 1987-08-07 Reduced pressure gas phase treatment equipment Expired - Lifetime JPH0729626Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987121259U JPH0729626Y2 (en) 1987-08-07 1987-08-07 Reduced pressure gas phase treatment equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987121259U JPH0729626Y2 (en) 1987-08-07 1987-08-07 Reduced pressure gas phase treatment equipment

Publications (2)

Publication Number Publication Date
JPS6426832U true JPS6426832U (en) 1989-02-15
JPH0729626Y2 JPH0729626Y2 (en) 1995-07-05

Family

ID=31368104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987121259U Expired - Lifetime JPH0729626Y2 (en) 1987-08-07 1987-08-07 Reduced pressure gas phase treatment equipment

Country Status (1)

Country Link
JP (1) JPH0729626Y2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04194233A (en) * 1990-11-28 1992-07-14 Fujimi Shizai Kk Seedling and plantng work on retaining wall
JPH0754427A (en) * 1992-04-28 1995-02-28 Hokushiyou Kensetsu:Kk Construction method of wall and device thereof
JPH10220832A (en) * 1997-02-03 1998-08-21 Mitsubishi Heavy Ind Ltd Safety device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62280366A (en) * 1986-05-30 1987-12-05 Hitachi Ltd Decompression chemical vapor phase deposition device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62280366A (en) * 1986-05-30 1987-12-05 Hitachi Ltd Decompression chemical vapor phase deposition device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04194233A (en) * 1990-11-28 1992-07-14 Fujimi Shizai Kk Seedling and plantng work on retaining wall
JPH0754427A (en) * 1992-04-28 1995-02-28 Hokushiyou Kensetsu:Kk Construction method of wall and device thereof
JPH10220832A (en) * 1997-02-03 1998-08-21 Mitsubishi Heavy Ind Ltd Safety device

Also Published As

Publication number Publication date
JPH0729626Y2 (en) 1995-07-05

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