JPS6426832U - - Google Patents

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Publication number
JPS6426832U
JPS6426832U JP12125987U JP12125987U JPS6426832U JP S6426832 U JPS6426832 U JP S6426832U JP 12125987 U JP12125987 U JP 12125987U JP 12125987 U JP12125987 U JP 12125987U JP S6426832 U JPS6426832 U JP S6426832U
Authority
JP
Japan
Prior art keywords
pressure
pump
gas phase
reduced
pump system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12125987U
Other languages
English (en)
Other versions
JPH0729626Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987121259U priority Critical patent/JPH0729626Y2/ja
Publication of JPS6426832U publication Critical patent/JPS6426832U/ja
Application granted granted Critical
Publication of JPH0729626Y2 publication Critical patent/JPH0729626Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Description

【図面の簡単な説明】
２……反応炉、３……パージガス、１０……タ
ーボ分子ポンプ（第１のポンプ）、１１……エグ
ゼクタポンプ（第２のポンプ）。
補正 昭６２．１０．２２ 図面の簡単な説明を次のように補正する。
【図面の簡単な説明】 第１図は、本考案の減圧気相処理装置の一実施
例の構成を示す概略図、第２図は、従来の減圧気
相処理装置の一例の構成を示す概略図、第３図は
、従来の減圧気相処理装置の他の一例の構成を示
す概略図である。 ２……反応炉、３……パージガス、１０……タ
ーボ分子ポンプ（第１のポンプ）、１１……エグ
ゼクタポンプ（第２のポンプ）。

Claims (1)

  1. 【実用新案登録請求の範囲】 ポンプシステムを備えた減圧気相処理装置にお
    いて、 前記ポンプシステムを、少なくともほぼ大気圧
    から反応炉内の圧力より低い圧力まで減圧を行う
    第１のポンプと、 パージガスを合流させる第２のポンプとを直列
    に接続して構成したことを特徴とする減圧気相処
    理装置。
JP1987121259U 1987-08-07 1987-08-07 減圧気相処理装置 Expired - Lifetime JPH0729626Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987121259U JPH0729626Y2 (ja) 1987-08-07 1987-08-07 減圧気相処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987121259U JPH0729626Y2 (ja) 1987-08-07 1987-08-07 減圧気相処理装置

Publications (2)

Publication Number Publication Date
JPS6426832U true JPS6426832U (ja) 1989-02-15
JPH0729626Y2 JPH0729626Y2 (ja) 1995-07-05

Family

ID=31368104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987121259U Expired - Lifetime JPH0729626Y2 (ja) 1987-08-07 1987-08-07 減圧気相処理装置

Country Status (1)

Country Link
JP (1) JPH0729626Y2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04194233A (ja) * 1990-11-28 1992-07-14 Fujimi Shizai Kk コンクリート擁壁の緑化工法
JPH0754427A (ja) * 1992-04-28 1995-02-28 Hokushiyou Kensetsu:Kk 壁体の構築工法及びその装置
JPH10220832A (ja) * 1997-02-03 1998-08-21 Mitsubishi Heavy Ind Ltd 安全装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62280366A (ja) * 1986-05-30 1987-12-05 Hitachi Ltd 減圧化学的気相堆積装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62280366A (ja) * 1986-05-30 1987-12-05 Hitachi Ltd 減圧化学的気相堆積装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04194233A (ja) * 1990-11-28 1992-07-14 Fujimi Shizai Kk コンクリート擁壁の緑化工法
JPH0754427A (ja) * 1992-04-28 1995-02-28 Hokushiyou Kensetsu:Kk 壁体の構築工法及びその装置
JPH10220832A (ja) * 1997-02-03 1998-08-21 Mitsubishi Heavy Ind Ltd 安全装置

Also Published As

Publication number Publication date
JPH0729626Y2 (ja) 1995-07-05

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