JPS64323B2 - - Google Patents

Info

Publication number
JPS64323B2
JPS64323B2 JP58124163A JP12416383A JPS64323B2 JP S64323 B2 JPS64323 B2 JP S64323B2 JP 58124163 A JP58124163 A JP 58124163A JP 12416383 A JP12416383 A JP 12416383A JP S64323 B2 JPS64323 B2 JP S64323B2
Authority
JP
Japan
Prior art keywords
silicon carbide
substrate
film
gas
methylhydrodiene
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58124163A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6016810A (ja
Inventor
Minoru Takamizawa
Susumu Ueno
Tatsuhiko Motomya
Tamaki Iida
Fujitsugu Fujino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd filed Critical Shin-Etsu Chemical Co Ltd
Priority to JP58124163A priority Critical patent/JPS6016810A/ja
Publication of JPS6016810A publication Critical patent/JPS6016810A/ja
Publication of JPS64323B2 publication Critical patent/JPS64323B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
JP58124163A 1983-07-08 1983-07-08 表面被覆膜の製造方法 Granted JPS6016810A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58124163A JPS6016810A (ja) 1983-07-08 1983-07-08 表面被覆膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58124163A JPS6016810A (ja) 1983-07-08 1983-07-08 表面被覆膜の製造方法

Publications (2)

Publication Number Publication Date
JPS6016810A JPS6016810A (ja) 1985-01-28
JPS64323B2 true JPS64323B2 (da) 1989-01-06

Family

ID=14878499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58124163A Granted JPS6016810A (ja) 1983-07-08 1983-07-08 表面被覆膜の製造方法

Country Status (1)

Country Link
JP (1) JPS6016810A (da)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5041303A (en) * 1988-03-07 1991-08-20 Polyplasma Incorporated Process for modifying large polymeric surfaces
JP2932604B2 (ja) * 1990-05-15 1999-08-09 東亞合成株式会社 炭化珪素膜を有する物品の製造方法
GB0509648D0 (en) * 2005-05-12 2005-06-15 Dow Corning Ireland Ltd Plasma system to deposit adhesion primer layers

Also Published As

Publication number Publication date
JPS6016810A (ja) 1985-01-28

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