JPS6435505A - Production of rectangular light guide made of iii-v group compound semiconductor having flush structure - Google Patents

Production of rectangular light guide made of iii-v group compound semiconductor having flush structure

Info

Publication number
JPS6435505A
JPS6435505A JP62190420A JP19042087A JPS6435505A JP S6435505 A JPS6435505 A JP S6435505A JP 62190420 A JP62190420 A JP 62190420A JP 19042087 A JP19042087 A JP 19042087A JP S6435505 A JPS6435505 A JP S6435505A
Authority
JP
Japan
Prior art keywords
light guide
iii
production
rectangular light
compound semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62190420A
Other languages
Japanese (ja)
Inventor
Yutaka Omori
Morio Kobayashi
Akiyuki Tate
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP62190420A priority Critical patent/JPS6435505A/en
Publication of JPS6435505A publication Critical patent/JPS6435505A/en
Pending legal-status Critical Current

Links

Landscapes

  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To produce a light guide having rectangular flush structure with good controllability by forming a clad layer utilizing the transformation of superlattice to mixed crystals after etching. CONSTITUTION:At least the lower clad layer 2 and a core layer 3 consisting of the superlattice are successively crystal-grown on a substrate crystal 1 and are etched down to the prescribed depth of the core layer 3 in such a manner that striped projecting parts of a desired width are formed. The front faces of the projecting parts are masked. An impurity is thereafter diffused from the etched side faces and base. The clad layer 2 and the core layer 3 are partly removed by etching and thereafter, the impurity is diffused therein, by which the shape is controlled with the good controllability and the rectangular light guide is produced.
JP62190420A 1987-07-31 1987-07-31 Production of rectangular light guide made of iii-v group compound semiconductor having flush structure Pending JPS6435505A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62190420A JPS6435505A (en) 1987-07-31 1987-07-31 Production of rectangular light guide made of iii-v group compound semiconductor having flush structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62190420A JPS6435505A (en) 1987-07-31 1987-07-31 Production of rectangular light guide made of iii-v group compound semiconductor having flush structure

Publications (1)

Publication Number Publication Date
JPS6435505A true JPS6435505A (en) 1989-02-06

Family

ID=16257838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62190420A Pending JPS6435505A (en) 1987-07-31 1987-07-31 Production of rectangular light guide made of iii-v group compound semiconductor having flush structure

Country Status (1)

Country Link
JP (1) JPS6435505A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5020748A (en) * 1990-04-25 1991-06-04 Pioneer Electronic Corporation Mounting structure for mounting an instrument on a supporting member of a motor vehicle

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5020748A (en) * 1990-04-25 1991-06-04 Pioneer Electronic Corporation Mounting structure for mounting an instrument on a supporting member of a motor vehicle

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