JPS6468704A - Proton exchange light guide - Google Patents
Proton exchange light guideInfo
- Publication number
- JPS6468704A JPS6468704A JP62225286A JP22528687A JPS6468704A JP S6468704 A JPS6468704 A JP S6468704A JP 62225286 A JP62225286 A JP 62225286A JP 22528687 A JP22528687 A JP 22528687A JP S6468704 A JPS6468704 A JP S6468704A
- Authority
- JP
- Japan
- Prior art keywords
- light guide
- proton exchange
- guide
- substrate
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 abstract 4
- 229910003327 LiNbO3 Inorganic materials 0.000 abstract 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 abstract 2
- 239000005711 Benzoic acid Substances 0.000 abstract 1
- 235000010233 benzoic acid Nutrition 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 230000000873 masking effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Landscapes
- Optical Integrated Circuits (AREA)
Abstract
PURPOSE:To easily obtain a light guide of a small width by masking the part of an LiNbO3 substrate except the side faces of the step provided to said substrate and executing a proton exchange from the side face direction, thereby forming the light guide. CONSTITUTION:The step 2 of the height T corresponding to a desired guide depth is formed by a method such as etching on the LiNbO3 substrate and the part except the side face of the step 2 is masked (mask 9). The proton exchange is then exchanged by immersing the substrate into a benzoic acid soln. kept at about 240 deg.C to form the proton exchange light guide 3. The depth of the guide can be set freely by the height T of the step and the width W of the guide by the proton exchange time, respectively. The light guide of the small guide width such as single mode channel light guide is thereby easily formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62225286A JPS6468704A (en) | 1987-09-10 | 1987-09-10 | Proton exchange light guide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62225286A JPS6468704A (en) | 1987-09-10 | 1987-09-10 | Proton exchange light guide |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6468704A true JPS6468704A (en) | 1989-03-14 |
Family
ID=16826954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62225286A Pending JPS6468704A (en) | 1987-09-10 | 1987-09-10 | Proton exchange light guide |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6468704A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009205112A (en) * | 2008-02-29 | 2009-09-10 | Sumitomo Electric Ind Ltd | Optical waveguide and method of manufacturing the same |
-
1987
- 1987-09-10 JP JP62225286A patent/JPS6468704A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009205112A (en) * | 2008-02-29 | 2009-09-10 | Sumitomo Electric Ind Ltd | Optical waveguide and method of manufacturing the same |
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