JPS64406A - Instrument for measuring shape of sample - Google Patents

Instrument for measuring shape of sample

Info

Publication number
JPS64406A
JPS64406A JP62156212A JP15621287A JPS64406A JP S64406 A JPS64406 A JP S64406A JP 62156212 A JP62156212 A JP 62156212A JP 15621287 A JP15621287 A JP 15621287A JP S64406 A JPS64406 A JP S64406A
Authority
JP
Japan
Prior art keywords
sample
plane
interference
rear face
fringes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62156212A
Other languages
English (en)
Other versions
JPH01406A (ja
JP2557650B2 (ja
Inventor
Koji Osawa
Hitoshi Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidek Co Ltd
Original Assignee
Nidek Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidek Co Ltd filed Critical Nidek Co Ltd
Priority to JP62156212A priority Critical patent/JP2557650B2/ja
Publication of JPH01406A publication Critical patent/JPH01406A/ja
Publication of JPS64406A publication Critical patent/JPS64406A/ja
Application granted granted Critical
Publication of JP2557650B2 publication Critical patent/JP2557650B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP62156212A 1987-06-23 1987-06-23 試料形状測定装置 Expired - Lifetime JP2557650B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62156212A JP2557650B2 (ja) 1987-06-23 1987-06-23 試料形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62156212A JP2557650B2 (ja) 1987-06-23 1987-06-23 試料形状測定装置

Publications (3)

Publication Number Publication Date
JPH01406A JPH01406A (ja) 1989-01-05
JPS64406A true JPS64406A (en) 1989-01-05
JP2557650B2 JP2557650B2 (ja) 1996-11-27

Family

ID=15622811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62156212A Expired - Lifetime JP2557650B2 (ja) 1987-06-23 1987-06-23 試料形状測定装置

Country Status (1)

Country Link
JP (1) JP2557650B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001304837A (ja) * 2000-04-19 2001-10-31 Nok Corp 平面検査装置および平面検査方法
JP2010060677A (ja) * 2008-09-02 2010-03-18 Sumitomo Bakelite Co Ltd フィルム表面形状測定用治具および測定方法
JP2021167786A (ja) * 2020-04-13 2021-10-21 株式会社神戸製鋼所 平坦度測定装置および方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4559271B2 (ja) * 2005-03-25 2010-10-06 東ソー株式会社 平板の厚みムラ測定方法および装置
US11333607B2 (en) 2018-10-02 2022-05-17 Electronics And Telecommunications Research Institute Fluorescent signal detection apparatus using diagnostic kit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5985906U (ja) * 1982-12-01 1984-06-11 富士写真光機株式会社 平面度測定装置
JPS60209106A (ja) * 1984-03-31 1985-10-21 Konishiroku Photo Ind Co Ltd 平面度検査装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5985906U (ja) * 1982-12-01 1984-06-11 富士写真光機株式会社 平面度測定装置
JPS60209106A (ja) * 1984-03-31 1985-10-21 Konishiroku Photo Ind Co Ltd 平面度検査装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001304837A (ja) * 2000-04-19 2001-10-31 Nok Corp 平面検査装置および平面検査方法
JP2010060677A (ja) * 2008-09-02 2010-03-18 Sumitomo Bakelite Co Ltd フィルム表面形状測定用治具および測定方法
JP2021167786A (ja) * 2020-04-13 2021-10-21 株式会社神戸製鋼所 平坦度測定装置および方法

Also Published As

Publication number Publication date
JP2557650B2 (ja) 1996-11-27

Similar Documents

Publication Publication Date Title
SE8502977D0 (sv) Instrument for metning av ytors topografi
DE68923172D1 (de) Verfahren und Fühler für optoelektronische Winkelmessung.
DK646488A (da) Apparat til identifikation af moenter
GB1563570A (en) Hardness tester
DE59006727D1 (de) Verfahren und anordnung zur optoelektronischen vermessung von gegenständen.
WO1998052025A1 (fr) Procede et instrument de controle de surface
KR890005522A (ko) 공간 필터식 속도측정 장치
JPS5759107A (en) Method and device for measuring plate thickness
JPS64406A (en) Instrument for measuring shape of sample
JPS63193003A (ja) 凹部深さ・膜厚測定装置
Pierce et al. A novel laser triangulation technique for high precision distance measurement
JPS6488327A (en) Shape measuring method for interference wave front
JPS6432105A (en) Angle deviation measuring instrument for flat plate member
JPS6472005A (en) Visual sensor
JPS56132508A (en) Pattern measuring device
JPS5912638Y2 (ja) 光電式検出装置
JPS6415642A (en) Apparatus for inspecting inside of tube
JPS55117946A (en) Flaw detection method of hollow shaft inside surface
SU1541668A1 (ru) Способ измерени величины угла взаимного наклона синхрозвуковой и стирающей головок в блоке магнитных головок
JPH01161521A (ja) 位置指定装置
JPS55411A (en) Surface roughness measurement with laser beam
JPS643534A (en) Instrument for measuring central thickness of lens
JPH0467884B2 (ja)
JPS5719639A (en) Measuring device for end surface angle of optical fiber
JPS55124002A (en) Optical position detector

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term