JPS64638A - Secondary electron detection device - Google Patents

Secondary electron detection device

Info

Publication number
JPS64638A
JPS64638A JP62156132A JP15613287A JPS64638A JP S64638 A JPS64638 A JP S64638A JP 62156132 A JP62156132 A JP 62156132A JP 15613287 A JP15613287 A JP 15613287A JP S64638 A JPS64638 A JP S64638A
Authority
JP
Japan
Prior art keywords
scintillator
secondary electron
circuit
brightness
constitution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62156132A
Other languages
Japanese (ja)
Other versions
JPH01638A (en
Inventor
Setsuo Norioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP62156132A priority Critical patent/JPS64638A/en
Publication of JPH01638A publication Critical patent/JPH01638A/en
Publication of JPS64638A publication Critical patent/JPS64638A/en
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)

Abstract

PURPOSE: To fix the brightness of a secondary electron image and also reduce any thermal damage of a scintillator by detecting a part of a luminous signal of the scintillator and controlling a voltage impressed on the scintillator in response to its detection output.
CONSTITUTION: A scintillator 5 is attached to the tip of a handle type optical fiber 6 of vacuumproof structure. A part of the fiber 6 is connected to an optical detector 12 and its output is inputted in the high-tension control 14 through a logarithmic 13. Further, a collector electrode is connected to a collector voltage control circuit 10 and the scintillator 5 is connected to a high-tension generation circuit 9. When a probe current incident on a sample 11 is increased by means of this constitution, the secondary electrons 2 from the sample 11 increase, while a circuit 14 controls voltage of the circuit 9 to reduce it responding thereto. Accordingly, while keeping the brightness of a secondary electron image almost fixed, thermal damage of the scintillator 5 can be reduced.
COPYRIGHT: (C)1989,JPO&Japio
JP62156132A 1987-06-23 1987-06-23 Secondary electron detection device Pending JPS64638A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62156132A JPS64638A (en) 1987-06-23 1987-06-23 Secondary electron detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62156132A JPS64638A (en) 1987-06-23 1987-06-23 Secondary electron detection device

Publications (2)

Publication Number Publication Date
JPH01638A JPH01638A (en) 1989-01-05
JPS64638A true JPS64638A (en) 1989-01-05

Family

ID=15621023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62156132A Pending JPS64638A (en) 1987-06-23 1987-06-23 Secondary electron detection device

Country Status (1)

Country Link
JP (1) JPS64638A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4948497A (en) * 1988-05-18 1990-08-14 General Atomics Acoustically fluidized bed of fine particles
US12037754B2 (en) 2021-05-26 2024-07-16 Mikasa Sangyo Co., Ltd. Breather for vibration generating device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4948497A (en) * 1988-05-18 1990-08-14 General Atomics Acoustically fluidized bed of fine particles
US12037754B2 (en) 2021-05-26 2024-07-16 Mikasa Sangyo Co., Ltd. Breather for vibration generating device

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