JPS6464314A - Sublimator - Google Patents

Sublimator

Info

Publication number
JPS6464314A
JPS6464314A JP22250787A JP22250787A JPS6464314A JP S6464314 A JPS6464314 A JP S6464314A JP 22250787 A JP22250787 A JP 22250787A JP 22250787 A JP22250787 A JP 22250787A JP S6464314 A JPS6464314 A JP S6464314A
Authority
JP
Japan
Prior art keywords
metal
gas
inlet
outlet
vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22250787A
Other languages
English (en)
Inventor
Kazuhisa Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP22250787A priority Critical patent/JPS6464314A/ja
Publication of JPS6464314A publication Critical patent/JPS6464314A/ja
Pending legal-status Critical Current

Links

JP22250787A 1987-09-04 1987-09-04 Sublimator Pending JPS6464314A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22250787A JPS6464314A (en) 1987-09-04 1987-09-04 Sublimator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22250787A JPS6464314A (en) 1987-09-04 1987-09-04 Sublimator

Publications (1)

Publication Number Publication Date
JPS6464314A true JPS6464314A (en) 1989-03-10

Family

ID=16783511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22250787A Pending JPS6464314A (en) 1987-09-04 1987-09-04 Sublimator

Country Status (1)

Country Link
JP (1) JPS6464314A (ja)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005033146A (ja) * 2003-07-11 2005-02-03 Tosoh Finechem Corp 固体有機金属化合物の充填方法および充填容器
JP2005033045A (ja) * 2003-07-08 2005-02-03 Tosoh Finechem Corp 固体有機金属化合物用充填容器およびその充填方法
JP2005535112A (ja) * 2002-07-30 2005-11-17 エーエスエム アメリカ インコーポレイテッド キャリアガスを使用した昇華システム
JP2011202199A (ja) * 2010-03-24 2011-10-13 Ube Industries Ltd 有機金属化合物の供給装置
US8137462B2 (en) 2006-10-10 2012-03-20 Asm America, Inc. Precursor delivery system
JP2013138238A (ja) * 2004-05-20 2013-07-11 Akzo Nobel Nv 固形化合物の蒸気を一定供給するためのバブラー
US10876205B2 (en) 2016-09-30 2020-12-29 Asm Ip Holding B.V. Reactant vaporizer and related systems and methods
US11624113B2 (en) 2019-09-13 2023-04-11 Asm Ip Holding B.V. Heating zone separation for reactant evaporation system
US11634812B2 (en) 2018-08-16 2023-04-25 Asm Ip Holding B.V. Solid source sublimator
US11926894B2 (en) 2016-09-30 2024-03-12 Asm Ip Holding B.V. Reactant vaporizer and related systems and methods

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005535112A (ja) * 2002-07-30 2005-11-17 エーエスエム アメリカ インコーポレイテッド キャリアガスを使用した昇華システム
JP2005033045A (ja) * 2003-07-08 2005-02-03 Tosoh Finechem Corp 固体有機金属化合物用充填容器およびその充填方法
KR101029894B1 (ko) * 2003-07-08 2011-04-18 토소 화인켐 가부시키가이샤 고체 유기 금속 화합물용 충전 용기 및 그 충전 방법
JP2005033146A (ja) * 2003-07-11 2005-02-03 Tosoh Finechem Corp 固体有機金属化合物の充填方法および充填容器
JP2013138238A (ja) * 2004-05-20 2013-07-11 Akzo Nobel Nv 固形化合物の蒸気を一定供給するためのバブラー
US8137462B2 (en) 2006-10-10 2012-03-20 Asm America, Inc. Precursor delivery system
US9593416B2 (en) 2006-10-10 2017-03-14 Asm America, Inc. Precursor delivery system
JP2011202199A (ja) * 2010-03-24 2011-10-13 Ube Industries Ltd 有機金属化合物の供給装置
US10876205B2 (en) 2016-09-30 2020-12-29 Asm Ip Holding B.V. Reactant vaporizer and related systems and methods
US11377732B2 (en) 2016-09-30 2022-07-05 Asm Ip Holding B.V. Reactant vaporizer and related systems and methods
US11926894B2 (en) 2016-09-30 2024-03-12 Asm Ip Holding B.V. Reactant vaporizer and related systems and methods
US11634812B2 (en) 2018-08-16 2023-04-25 Asm Ip Holding B.V. Solid source sublimator
US11773486B2 (en) 2018-08-16 2023-10-03 Asm Ip Holding B.V. Solid source sublimator
US12540391B2 (en) 2018-08-16 2026-02-03 Asm Ip Holding B.V. Solid source sublimator
US11624113B2 (en) 2019-09-13 2023-04-11 Asm Ip Holding B.V. Heating zone separation for reactant evaporation system

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