JPS64726A - Forming method of deposit film - Google Patents

Forming method of deposit film

Info

Publication number: JPS64726A
Authority: JP; Japan
Prior art keywords: film; active species; chamber; gas; period
Prior art date: 1987-03-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP62073615A

Other languages

English (en)

Other versions

JPH01726A (ja

Inventor

Shunichi Ishihara

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Canon Inc

Original Assignee

Canon Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-03-23

Filing date

1987-03-27

Publication date

1989-01-05

1987-03-27 Application filed by Canon Inc filed Critical Canon Inc

1987-03-27 Priority to JP62073615A priority Critical patent/JPS64726A/ja

1989-01-05 Publication of JPH01726A publication Critical patent/JPH01726A/ja

1989-01-05 Publication of JPS64726A publication Critical patent/JPS64726A/ja

Status Pending legal-status Critical Current

Links

230000015572 biosynthetic process Effects 0.000 abstract 4
230000003213 activating effect Effects 0.000 abstract 2
230000004913 activation Effects 0.000 abstract 2
239000003054 catalyst Substances 0.000 abstract 2
229910000765 intermetallic Inorganic materials 0.000 abstract 2
229910052751 metal Inorganic materials 0.000 abstract 2
239000002184 metal Substances 0.000 abstract 2
239000007787 solid Substances 0.000 abstract 2
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 abstract 1
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
229910052799 carbon Inorganic materials 0.000 abstract 1
150000001875 compounds Chemical class 0.000 abstract 1
239000004020 conductor Substances 0.000 abstract 1
229910052736 halogen Inorganic materials 0.000 abstract 1
150000002367 halogens Chemical class 0.000 abstract 1
230000001939 inductive effect Effects 0.000 abstract 1
238000004519 manufacturing process Methods 0.000 abstract 1
229910052750 molybdenum Inorganic materials 0.000 abstract 1
239000011733 molybdenum Substances 0.000 abstract 1
230000000737 periodic effect Effects 0.000 abstract 1
239000002994 raw material Substances 0.000 abstract 1
239000000758 substrate Substances 0.000 abstract 1

Landscapes

Light Receiving Elements (AREA)

JP62073615A 1987-03-23 1987-03-27 Forming method of deposit film Pending JPS64726A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP62073615A JPS64726A (en)	1987-03-23	1987-03-27	Forming method of deposit film

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP62-65829		1987-03-23
JP6582987		1987-03-23
JP62073615A JPS64726A (en)	1987-03-23	1987-03-27	Forming method of deposit film

Publications (2)

Publication Number	Publication Date
JPH01726A JPH01726A (ja)	1989-01-05
JPS64726A true JPS64726A (en)	1989-01-05

Family

ID=26406977

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP62073615A Pending JPS64726A (en)	1987-03-23	1987-03-27	Forming method of deposit film

Country Status (1)

Country	Link
JP (1)	JPS64726A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN109292498A (zh) *	2018-09-28	2019-02-01	南安市罗兴工业设计有限公司	一种具有滤碳处理的薄膜粗化膜卷一体机

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US9216253B2 (en)	2010-08-16	2015-12-22	Becton, Dickinson And Company	Needle dispensing and storing apparatus for medicament delivery device

1987
- 1987-03-27 JP JP62073615A patent/JPS64726A/ja active Pending

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN109292498A (zh) *	2018-09-28	2019-02-01	南安市罗兴工业设计有限公司	一种具有滤碳处理的薄膜粗化膜卷一体机

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