KR970077182A - 반도체 이온주입설비의 이온발생장치 - Google Patents

반도체 이온주입설비의 이온발생장치 Download PDF

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Publication number
KR970077182A
KR970077182A KR1019960015150A KR19960015150A KR970077182A KR 970077182 A KR970077182 A KR 970077182A KR 1019960015150 A KR1019960015150 A KR 1019960015150A KR 19960015150 A KR19960015150 A KR 19960015150A KR 970077182 A KR970077182 A KR 970077182A
Authority
KR
South Korea
Prior art keywords
base plate
filament
ion
generating device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
KR1019960015150A
Other languages
English (en)
Korean (ko)
Inventor
김원주
김원영
김동식
조홍래
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960015150A priority Critical patent/KR970077182A/ko
Priority to JP8239089A priority patent/JPH09306372A/ja
Publication of KR970077182A publication Critical patent/KR970077182A/ko
Abandoned legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/083—Beam forming

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
KR1019960015150A 1996-05-08 1996-05-08 반도체 이온주입설비의 이온발생장치 Abandoned KR970077182A (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1019960015150A KR970077182A (ko) 1996-05-08 1996-05-08 반도체 이온주입설비의 이온발생장치
JP8239089A JPH09306372A (ja) 1996-05-08 1996-09-10 半導体イオン注入設備のイオン発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960015150A KR970077182A (ko) 1996-05-08 1996-05-08 반도체 이온주입설비의 이온발생장치

Publications (1)

Publication Number Publication Date
KR970077182A true KR970077182A (ko) 1997-12-12

Family

ID=19458134

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960015150A Abandoned KR970077182A (ko) 1996-05-08 1996-05-08 반도체 이온주입설비의 이온발생장치

Country Status (2)

Country Link
JP (1) JPH09306372A (ja)
KR (1) KR970077182A (ja)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2131051B (en) * 1982-05-07 1985-10-23 Inst Mash Im A A Blagonravova Method for chemical heat treatment of parts made of steels and alloys
JPH08111198A (ja) * 1994-10-11 1996-04-30 Ulvac Japan Ltd イオン源

Also Published As

Publication number Publication date
JPH09306372A (ja) 1997-11-28

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