MD4347C1 - Газовый сенсор на основе MoO3 - Google Patents
Газовый сенсор на основе MoO3 Download PDFInfo
- Publication number
- MD4347C1 MD4347C1 MDA20140071A MD20140071A MD4347C1 MD 4347 C1 MD4347 C1 MD 4347C1 MD A20140071 A MDA20140071 A MD A20140071A MD 20140071 A MD20140071 A MD 20140071A MD 4347 C1 MD4347 C1 MD 4347C1
- Authority
- MD
- Moldova
- Prior art keywords
- sensor
- moo3
- ethanol
- sensitive
- sensitivity
- Prior art date
Links
- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical compound O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 title claims description 27
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 238000010438 heat treatment Methods 0.000 claims abstract description 6
- 229910000476 molybdenum oxide Inorganic materials 0.000 abstract description 3
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 33
- 235000019441 ethanol Nutrition 0.000 description 18
- 230000035945 sensitivity Effects 0.000 description 12
- 239000007789 gas Substances 0.000 description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 238000011084 recovery Methods 0.000 description 5
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- IKHGUXGNUITLKF-UHFFFAOYSA-N Acetaldehyde Chemical compound CC=O IKHGUXGNUITLKF-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000002055 nanoplate Substances 0.000 description 1
- 239000002073 nanorod Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Изобретение относится к технике оксидных полупроводников, в частности к газовым сенсорам на основе оксида молибдена.Газовый сенсор на основе MoO3 включает диэлектрическую подложку, на одной стороне которой расположен чувствительный слой из MoO3, с нанесенными на него омическими контактами, формирующими чувствительную зону, а на противоположной поверхности подложки нанесен нагревательный элемент. Чувствительный слой выполнен в виде нанокристаллической полоски с толщиной 150 нм и шириной чувствительной зоны 150 µм.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDA20140071A MD4347C1 (ru) | 2014-07-15 | 2014-07-15 | Газовый сенсор на основе MoO3 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDA20140071A MD4347C1 (ru) | 2014-07-15 | 2014-07-15 | Газовый сенсор на основе MoO3 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| MD4347B1 MD4347B1 (ru) | 2015-04-30 |
| MD4347C1 true MD4347C1 (ru) | 2015-11-30 |
Family
ID=53002926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MDA20140071A MD4347C1 (ru) | 2014-07-15 | 2014-07-15 | Газовый сенсор на основе MoO3 |
Country Status (1)
| Country | Link |
|---|---|
| MD (1) | MD4347C1 (ru) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| MD4495C1 (ru) * | 2016-09-09 | 2018-01-31 | Николай АБАБИЙ | Сенсор этанола на основе оксида меди |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0851222A1 (en) * | 1996-12-31 | 1998-07-01 | Corning Incorporated | Metal oxide semiconductor catalyst hydrocarbon sensor |
| MD2154C2 (ru) * | 2001-11-07 | 2003-10-31 | Валериан ДОРОГАН | Газовый датчик |
| MD2220C2 (ru) * | 2000-09-28 | 2004-01-31 | Валериу МИРОН | Гетеропереходный датчик токсических газов |
| MD3086G2 (ru) * | 2005-08-10 | 2007-01-31 | Институт Прикладной Физики Академии Наук Молдовы | Полупроводниковый газовый сенсор |
| MD3018G2 (ru) * | 2005-08-10 | 2007-01-31 | Институт Прикладной Физики Академии Наук Молдовы | Газовый сенсор |
| RU2294534C2 (ru) * | 2001-11-08 | 2007-02-27 | Каунсил Оф Сайентифик Энд Индастриал Рисерч | Тонкоплёночный сенсор на этанол и способ его получения |
| JP2008224447A (ja) * | 2007-03-13 | 2008-09-25 | Matsushita Electric Works Ltd | 酸化モリブデン薄膜の製造方法及び化学センサ |
| CN101723462A (zh) * | 2009-10-30 | 2010-06-09 | 陕西科技大学 | 一种纤维状MoO3纳米带的制备方法 |
| US7981215B2 (en) * | 2006-05-22 | 2011-07-19 | The Research Foundation Of State University Of New York | Electrospun single crystal MoO3 nanowires for bio-chem sensing probes |
| US20120094124A1 (en) * | 2008-11-19 | 2012-04-19 | Pelagia-Irene Gouma | ELECTROSPUN SINGLE CRYSTAL MoO3 NANOWIRES FOR BIO-CHEM SENSING PROBES |
| CN102621186B (zh) * | 2012-04-11 | 2013-07-10 | 孔祥吉 | 一种汽油传感器及其制作方法 |
| UA85925U (ru) * | 2013-05-07 | 2013-12-10 | Львовский Национальный Университет Имени Ивана Франка | Резистивный сенсор этанола |
| MD712Z (ru) * | 2013-03-26 | 2014-07-31 | Технический университет Молдовы | Способ получения наноструктур MoO3 |
-
2014
- 2014-07-15 MD MDA20140071A patent/MD4347C1/ru not_active IP Right Cessation
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0851222A1 (en) * | 1996-12-31 | 1998-07-01 | Corning Incorporated | Metal oxide semiconductor catalyst hydrocarbon sensor |
| MD2220C2 (ru) * | 2000-09-28 | 2004-01-31 | Валериу МИРОН | Гетеропереходный датчик токсических газов |
| MD2154C2 (ru) * | 2001-11-07 | 2003-10-31 | Валериан ДОРОГАН | Газовый датчик |
| RU2294534C2 (ru) * | 2001-11-08 | 2007-02-27 | Каунсил Оф Сайентифик Энд Индастриал Рисерч | Тонкоплёночный сенсор на этанол и способ его получения |
| MD3086G2 (ru) * | 2005-08-10 | 2007-01-31 | Институт Прикладной Физики Академии Наук Молдовы | Полупроводниковый газовый сенсор |
| MD3018G2 (ru) * | 2005-08-10 | 2007-01-31 | Институт Прикладной Физики Академии Наук Молдовы | Газовый сенсор |
| US7981215B2 (en) * | 2006-05-22 | 2011-07-19 | The Research Foundation Of State University Of New York | Electrospun single crystal MoO3 nanowires for bio-chem sensing probes |
| JP2008224447A (ja) * | 2007-03-13 | 2008-09-25 | Matsushita Electric Works Ltd | 酸化モリブデン薄膜の製造方法及び化学センサ |
| US20120094124A1 (en) * | 2008-11-19 | 2012-04-19 | Pelagia-Irene Gouma | ELECTROSPUN SINGLE CRYSTAL MoO3 NANOWIRES FOR BIO-CHEM SENSING PROBES |
| CN101723462A (zh) * | 2009-10-30 | 2010-06-09 | 陕西科技大学 | 一种纤维状MoO3纳米带的制备方法 |
| CN102621186B (zh) * | 2012-04-11 | 2013-07-10 | 孔祥吉 | 一种汽油传感器及其制作方法 |
| MD712Z (ru) * | 2013-03-26 | 2014-07-31 | Технический университет Молдовы | Способ получения наноструктур MoO3 |
| UA85925U (ru) * | 2013-05-07 | 2013-12-10 | Львовский Национальный Университет Имени Ивана Франка | Резистивный сенсор этанола |
Non-Patent Citations (3)
| Title |
|---|
| Chen D. et al. Single - crystalline MoO3 nanoplates: topochemical synthesis and enhanced ethanol-sensing performance. J. Material Chemistry, 21, 2011, p. 9332 - 9342 * |
| Navas Illyaskutty et al. Enhanced ethanol sensing response from nanostructured MoO3 : ZnO thin films and their mechanism of sensing, Materials Chemistry C, 2013, p. 3976 - 3984 * |
| Navas Illyaskutty et al. Hydrogen and ethanol sensing properties of molybdenum oxide nanorods thin films: Effect of electrode metallization and humid ambiance. Sensors and actuators B: Chemical, 187, 2013, p. 611 - 621 * |
Also Published As
| Publication number | Publication date |
|---|---|
| MD4347B1 (ru) | 2015-04-30 |
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| Date | Code | Title | Description |
|---|---|---|---|
| FG4A | Patent for invention issued | ||
| KA4A | Patent for invention lapsed due to non-payment of fees (with right of restoration) | ||
| MM4A | Patent for invention definitely lapsed due to non-payment of fees |