PH31538A - Method and apparatus for automated docking of a test head to a device handler. - Google Patents

Method and apparatus for automated docking of a test head to a device handler.

Info

Publication number
PH31538A
PH31538A PH51896A PH51896A PH31538A PH 31538 A PH31538 A PH 31538A PH 51896 A PH51896 A PH 51896A PH 51896 A PH51896 A PH 51896A PH 31538 A PH31538 A PH 31538A
Authority
PH
Philippines
Prior art keywords
test head
device handler
axis
automated docking
positioner
Prior art date
Application number
PH51896A
Other languages
English (en)
Inventor
Daniel J Graham
Alyn R Holt
Robert E Matthiessen
Marvin Weilerstein
Christopher L West
Original Assignee
Intest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intest Corp filed Critical Intest Corp
Publication of PH31538A publication Critical patent/PH31538A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1694—Program controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37133—Linear, rotary variable differential transformer, lvdt, rvdt
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37404—Orientation of workpiece or tool, surface sensor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/40—Robotics, robotics mapping to robotics vision
    • G05B2219/40082—Docking, align object on end effector with target
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45089—Testing robot
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49117—Alignment of surfaces to get them parallel

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
PH51896A 1994-12-12 1995-12-12 Method and apparatus for automated docking of a test head to a device handler. PH31538A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/355,501 US5600258A (en) 1993-09-15 1994-12-12 Method and apparatus for automated docking of a test head to a device handler

Publications (1)

Publication Number Publication Date
PH31538A true PH31538A (en) 1998-11-03

Family

ID=23397664

Family Applications (1)

Application Number Title Priority Date Filing Date
PH51896A PH31538A (en) 1994-12-12 1995-12-12 Method and apparatus for automated docking of a test head to a device handler.

Country Status (10)

Country Link
US (2) US5600258A (ja)
EP (1) EP0716905B1 (ja)
JP (1) JP2878169B2 (ja)
KR (1) KR100225805B1 (ja)
CN (1) CN1107231C (ja)
AT (1) ATE177983T1 (ja)
DE (1) DE69508542T2 (ja)
MY (1) MY112312A (ja)
PH (1) PH31538A (ja)
SG (1) SG34322A1 (ja)

Families Citing this family (96)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345170A (en) 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US6057695A (en) * 1993-09-15 2000-05-02 Intest Corporation Method and apparatus for automated docking of a test head to a device handler
US6232789B1 (en) 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US5561377A (en) 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
US6166552A (en) * 1996-06-10 2000-12-26 Motorola Inc. Method and apparatus for testing a semiconductor wafer
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6009536A (en) * 1996-09-20 1999-12-28 Micron Electronics, Inc. Method for using fuse identification codes for masking bad bits on memory modules
JP3494828B2 (ja) * 1996-11-18 2004-02-09 株式会社アドバンテスト 水平搬送テストハンドラ
US6002263A (en) 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6332183B1 (en) 1998-03-05 2001-12-18 Micron Technology, Inc. Method for recovery of useful areas of partially defective synchronous memory components
US6314527B1 (en) 1998-03-05 2001-11-06 Micron Technology, Inc. Recovery of useful areas of partially defective synchronous memory components
US6381707B1 (en) 1998-04-28 2002-04-30 Micron Technology, Inc. System for decoding addresses for a defective memory array
US6381708B1 (en) 1998-04-28 2002-04-30 Micron Technology, Inc. Method for decoding addresses for a defective memory array
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6496876B1 (en) 1998-12-21 2002-12-17 Micron Technology, Inc. System and method for storing a tag to identify a functional storage location in a memory device
US6578264B1 (en) 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US6310486B1 (en) 1999-10-01 2001-10-30 Teradyne, Inc. Integrated test cell
US6838890B2 (en) 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
MY144519A (en) * 2000-03-01 2011-09-30 Intest Corp Vertical counter balanced test head manipulator
US6578157B1 (en) 2000-03-06 2003-06-10 Micron Technology, Inc. Method and apparatus for recovery of useful areas of partially defective direct rambus rimm components
US7269765B1 (en) 2000-04-13 2007-09-11 Micron Technology, Inc. Method and apparatus for storing failing part locations in a module
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
EP1322964B1 (en) 2000-09-20 2005-11-23 Intest Ip Corp. Electronic test head positioner
EP1712923B1 (en) 2000-09-22 2013-05-15 inTEST Corporation Apparatus and method for balancing and for providing a compliant range to a test head
DE10143173A1 (de) 2000-12-04 2002-06-06 Cascade Microtech Inc Wafersonde
US6586925B2 (en) 2001-04-09 2003-07-01 St Assembly Test Services Ltd. Method and apparatus for establishing quick and reliable connection between a semiconductor device handler plate and a semiconductor device test head plate
US6970634B2 (en) * 2001-05-04 2005-11-29 Cascade Microtech, Inc. Fiber optic wafer probe
US7008802B2 (en) * 2001-05-29 2006-03-07 Asm America, Inc. Method and apparatus to correct water drift
US6766996B1 (en) 2001-07-16 2004-07-27 Reid-Ashman Manufacturing, Inc. Manipulator
EP1410048B1 (en) 2001-07-16 2010-12-29 inTEST Corporation Test head docking system and method
US7355420B2 (en) 2001-08-21 2008-04-08 Cascade Microtech, Inc. Membrane probing system
EP1432546A4 (en) 2001-08-31 2006-06-07 Cascade Microtech Inc OPTICAL TESTING APPARATUS
US6897645B2 (en) * 2001-12-29 2005-05-24 Vincent Hing Chung So Docking system and method for docking in automated testing systems
KR100583949B1 (ko) * 2002-01-07 2006-05-26 삼성전자주식회사 웨이퍼 프로빙 장치 및 테스트 헤드 도킹 제어방법
US6646431B1 (en) 2002-01-22 2003-11-11 Elite E/M, Inc. Test head manipulator
US6777964B2 (en) 2002-01-25 2004-08-17 Cascade Microtech, Inc. Probe station
US7276894B2 (en) * 2002-04-15 2007-10-02 Intest Corporation Dynamic cradle assembly positioner system for positioning an electronic device test head
EP1509776A4 (en) 2002-05-23 2010-08-18 Cascade Microtech Inc PROBE TO TEST ANY TESTING EQUIPMENT
US6567725B1 (en) * 2002-07-15 2003-05-20 Speedfam-Ipec Corporation Method and apparatus for teaching robot station location
US6847219B1 (en) 2002-11-08 2005-01-25 Cascade Microtech, Inc. Probe station with low noise characteristics
US6724205B1 (en) 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
US7250779B2 (en) 2002-11-25 2007-07-31 Cascade Microtech, Inc. Probe station with low inductance path
US6861856B2 (en) 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
US7235964B2 (en) * 2003-03-31 2007-06-26 Intest Corporation Test head positioning system and method
US7221172B2 (en) 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US6836329B1 (en) * 2003-07-09 2004-12-28 International Business Machines Corporation Real time IR optical sensor
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
DE202004021093U1 (de) 2003-12-24 2006-09-28 Cascade Microtech, Inc., Beaverton Aktiver Halbleiterscheibenmessfühler
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
WO2005121824A2 (en) 2004-06-07 2005-12-22 Cascade Microtech, Inc. Thermal optical chuck
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
JP4980903B2 (ja) 2004-07-07 2012-07-18 カスケード マイクロテック インコーポレイテッド 膜懸垂プローブを具えるプローブヘッド
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
JP5080459B2 (ja) 2005-06-13 2012-11-21 カスケード マイクロテック インコーポレイテッド 広帯域能動/受動差動信号プローブ
US7312604B2 (en) * 2005-07-29 2007-12-25 Nextest Systems Corporation Portable manipulator for stackable semiconductor test system
US7598725B2 (en) * 2005-12-30 2009-10-06 Teradyne, Inc. Alignment receptacle of a sensor adapted to interact with a pin to generate position data along at least two transverse axes for docking a test head
US7783384B2 (en) * 2006-05-31 2010-08-24 Kraft Brett W Ambidextrous robotic master controller
DE202007018733U1 (de) 2006-06-09 2009-03-26 Cascade Microtech, Inc., Beaverton Messfühler für differentielle Signale mit integrierter Symmetrieschaltung
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
TWI439709B (zh) * 2006-12-29 2014-06-01 Intest Corp 用於使負載沿平移軸線平移之操縱器與負載定位系統
US8350584B2 (en) * 2006-12-29 2013-01-08 Intest Corporation Test head positioning system and method
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US8041450B2 (en) * 2007-10-04 2011-10-18 Asm Japan K.K. Position sensor system for substrate transfer robot
KR101489963B1 (ko) * 2007-12-13 2015-02-04 한국에이에스엠지니텍 주식회사 박막 증착 장치 및 이를 이용한 증착 방법
US8273178B2 (en) * 2008-02-28 2012-09-25 Asm Genitech Korea Ltd. Thin film deposition apparatus and method of maintaining the same
US7963736B2 (en) * 2008-04-03 2011-06-21 Asm Japan K.K. Wafer processing apparatus with wafer alignment device
JP5226072B2 (ja) * 2008-07-14 2013-07-03 株式会社アドバンテスト テストヘッド移動装置及び電子部品試験装置
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
JP5452766B2 (ja) * 2010-04-02 2014-03-26 アクティエボラゲット・エスコーエッフ 多数スタッド引張機械および複数のスタッドの伸びを自動制御する方法
SG10201605656TA (en) 2011-07-12 2016-08-30 Intest Corp Method and apparatus for docking a test head with a peripheral
CN104508504A (zh) * 2012-11-05 2015-04-08 伊斯梅卡半导体控股公司 用于对部件的性能进行测试的组件
TWI706487B (zh) * 2016-03-28 2020-10-01 日商東京精密股份有限公司 探針機台及探針機台的操作方法
CN106024981B (zh) * 2016-07-08 2018-10-09 江苏博硕智能系统有限公司 一种物料的铺设方法及所用的铺设系统
CN107817059B (zh) * 2017-12-13 2019-05-24 中国飞机强度研究所 一种轮胎温度测量装置
CN108132411B (zh) * 2017-12-29 2023-10-27 重庆市灵龙自动化设备有限公司 用于扩展坞的高效检测仪
CN108226758A (zh) * 2018-03-09 2018-06-29 京东方科技集团股份有限公司 一种检测设备及其控制方法
CN108872924B (zh) * 2018-06-28 2024-03-19 广东电网有限责任公司 电能表检定装置及系统
CN109333525B (zh) * 2018-11-22 2023-12-26 杭州极木科技有限公司 一种可旋转的机械臂
CN110196405A (zh) * 2019-06-27 2019-09-03 南方电网科学研究院有限责任公司 用于电能表现场校验仪的辅助系统
US11498207B2 (en) * 2021-01-08 2022-11-15 Teradyne, Inc. Test head manipulator configured to address uncontrolled test head rotation
CN114325325B (zh) * 2021-12-29 2023-12-01 日月新半导体(昆山)有限公司 用于测试集成电路产品的装置
KR102725022B1 (ko) * 2024-01-23 2024-11-01 주식회사 프로이천 3축방향 회전의 구속에 의해 프로브블록의 흔들림이 방지된 프로브 검사장치
KR102865456B1 (ko) * 2024-09-13 2025-09-26 주식회사 에스에이치엘 포고핀 센터링 장치

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE32119C (de) * TH. NORDENFELT in London und C. G. WITTEN STRÖM in Motala, Schweden Neuerung an Apparaten zum Verbrennen von Naphta und anderen flüchtigen Flüssigkeiten
US2697529A (en) * 1951-02-27 1954-12-21 John P Hubbell Apparatus for handling frangible articles by remote control
NL253341A (ja) * 1959-07-02
US3262593A (en) * 1963-07-10 1966-07-26 Gen Mills Inc Wall-mounted support structure
US3665148A (en) * 1971-04-07 1972-05-23 Gen Motors Corp Six-axis manipulator
DE2226407C3 (de) * 1972-05-31 1978-10-12 Industrie-Werke Karlsruhe Augsburg Ag, 7500 Karlsruhe Gerät zur maschinellen, durch veränderbare Programme steuerbaren Handreichung
DE2630857A1 (de) * 1976-07-09 1978-01-12 Volkswagenwerk Ag Handhabungsautomat
US4328553A (en) * 1976-12-07 1982-05-04 Computervision Corporation Method and apparatus for targetless wafer alignment
US4160207A (en) * 1977-06-27 1979-07-03 Haines Fred E Printed circuit board tester with removable head
DE2861285D1 (en) * 1977-10-20 1982-01-14 Ici Plc An industrial manipulator for placing articles in close proximity to adjacent articles and a method of close packing articles therewith
US4303368A (en) * 1978-09-18 1981-12-01 Westinghouse Electric Corp. Remote docking apparatus
US4229136A (en) * 1979-03-19 1980-10-21 International Business Machines Corporation Programmable air pressure counterbalance system for a manipulator
US4272892A (en) * 1979-08-10 1981-06-16 Omnicomp, Inc. Automatic test probe positioning apparatus
DE3042656A1 (de) * 1980-11-12 1982-06-16 Walter Dipl.-Ing. Dr. 6078 Neu-Isenburg Hillesheimer Hydraulisch betriebene hebebuehne
FR2473029A1 (fr) * 1980-01-08 1981-07-10 Hillesheimer Walter Pont elevateur, transporteur ou basculant, actionne hydrauliquement
US4379335A (en) * 1980-10-28 1983-04-05 Auto-Place, Inc. Electronic controller and portable programmer system for a pneumatically-powered point-to-point robot
US4527942A (en) * 1982-08-25 1985-07-09 Intest Corporation Electronic test head positioner for test systems
EP0102217B1 (en) * 1982-08-25 1988-06-01 InTest Corporation Electronic test head positioner for test systems
US4705447A (en) * 1983-08-11 1987-11-10 Intest Corporation Electronic test head positioner for test systems
US4652204A (en) * 1985-08-02 1987-03-24 Arnett Edward M Apparatus for handling hazardous materials
US4751457A (en) * 1986-09-08 1988-06-14 Tektronix, Inc. Integrated circuit probe parallelism establishing method and apparatus
JPS6465848A (en) * 1987-09-04 1989-03-13 Canon Kk Alignment
DE3713548A1 (de) * 1987-04-23 1988-11-03 Heidenhain Gmbh Dr Johannes Montageverfahren fuer eine positionsmesseinrichtung
US4893074A (en) * 1988-05-13 1990-01-09 Intest Corporation Electronic device testing system
FR2645679B1 (fr) * 1989-04-07 1994-05-06 Onera (Off Nat Aerospatiale) Installation de test, en particulier pour plaquettes de materiau semi-conducteur
JPH03159148A (ja) * 1989-11-16 1991-07-09 Advantest Corp 位置決め装置及びこの位置決め装置を利用したic試験装置
US5390104A (en) * 1990-04-02 1995-02-14 Fulton; Francis M. Adaptive control man-augmentation system for a suspended work station
US5196998A (en) * 1990-04-02 1993-03-23 Fulton Francis M Adaptive control man-augmentation system for a suspended work station
US5321351A (en) * 1990-05-25 1994-06-14 Everett Charles Technologies, Inc. Test fixture alignment system
US5030869A (en) * 1990-07-25 1991-07-09 Intest Corporation Device testing system with cable pivot
JP3012853B2 (ja) * 1990-09-14 2000-02-28 株式会社富士通宮城エレクトロニクス 半導体試験装置のハンドラー
US5124644A (en) * 1990-12-19 1992-06-23 Vlsi Technology, Inc. System for positioning a semiconductor chip package with respect to a testing device
US5263775A (en) * 1991-02-01 1993-11-23 Aetrium, Inc. Apparatus for handling devices under varying temperatures
US5513948A (en) * 1991-05-17 1996-05-07 Kensington Laboratories, Inc. Universal specimen prealigner
US5168003A (en) * 1991-06-24 1992-12-01 Ford Motor Company Step gradient anti-iridescent coatings
US5241870A (en) * 1991-07-22 1993-09-07 Intest Corporation Test head manipulator
US5321352A (en) * 1991-08-01 1994-06-14 Tokyo Electron Yamanashi Limited Probe apparatus and method of alignment for the same
US5404111A (en) * 1991-08-03 1995-04-04 Tokyo Electron Limited Probe apparatus with a swinging holder for an object of examination
US5440943A (en) * 1993-09-15 1995-08-15 Intest Corporation Electronic test head manipulator

Also Published As

Publication number Publication date
US5600258A (en) 1997-02-04
EP0716905B1 (en) 1999-03-24
KR960024441A (ko) 1996-07-20
EP0716905A2 (en) 1996-06-19
CN1107231C (zh) 2003-04-30
JP2878169B2 (ja) 1999-04-05
ATE177983T1 (de) 1999-04-15
EP0716905A3 (en) 1996-08-14
KR100225805B1 (ko) 1999-10-15
JPH08220190A (ja) 1996-08-30
DE69508542D1 (de) 1999-04-29
DE69508542T2 (de) 1999-12-23
US5900737A (en) 1999-05-04
MY112312A (en) 2001-05-31
SG34322A1 (en) 1996-12-06
CN1136665A (zh) 1996-11-27

Similar Documents

Publication Publication Date Title
SG34322A1 (en) Method and apparatus for automated docking of a test head to a device handler
EP0962777A3 (en) Printed circuit board testing apparatus
AU2001244956A1 (en) Milk sampling apparatus and method
CA2346613A1 (en) Method and apparatus for positioning a device in a body
GB2110427A (en) Industrial robot
US6889119B2 (en) Robotic device for loading laboratory instruments
ATE109278T1 (de) Gerät zur untersuchung einer elektronischen vorrichtung in fester baugruppe.
ATE165670T1 (de) Regelbares bildaufnahmesystem mit zwei detektoren
KR950009277A (ko) 전자 테스트 헤드 머니 풀레이터
EP0248679A3 (en) Method of using and apparatus for use in a microscope
EP0616239A3 (en) Method for positioning an electro-optical probe of a voltage measurement device.
DK115691D0 (da) Apparat til aftastning af et profil, samt anvendelse heraf
EP0911635A1 (en) Turntable acceleration generating apparatus
DK0865331T3 (da) Bøjecentrum
DE3869398D1 (de) Apparat zum fuehren eines einfaedelblocks einer magnetischen bandkassette.
JPH07171779A (ja) 走行装置付工業用ロボットの芯出し方法
SE9400908L (sv) Koordinatmätmaskin
JPS6427885A (en) Part fixture
MY126330A (en) Electronic test head manipulator
Mater Evolution of silicon materials characterization: lessons learned for improved manufacturing
CN119566754A (zh) 一种电路板组装方法、装置、组装设备及存储介质
JPH0729504Y2 (ja) 半導体テスト装置用の支持体
JPH07927Y2 (ja) 超音波検査装置の被検体保持治具
JPH0345768B2 (ja)
JPH07299785A (ja) 型材保持具への型材の移送方法及びそれに用いる装置