SE0200137D0 - Fabrication method, varactor, and integrated circuit - Google Patents

Fabrication method, varactor, and integrated circuit

Info

Publication number
SE0200137D0
SE0200137D0 SE0200137A SE0200137A SE0200137D0 SE 0200137 D0 SE0200137 D0 SE 0200137D0 SE 0200137 A SE0200137 A SE 0200137A SE 0200137 A SE0200137 A SE 0200137A SE 0200137 D0 SE0200137 D0 SE 0200137D0
Authority
SE
Sweden
Prior art keywords
sup
doped region
forming
doped
region
Prior art date
Application number
SE0200137A
Other languages
English (en)
Other versions
SE0200137L (sv
Inventor
Ted Johansson
Hans Norstroem
Stefan Sahl
Original Assignee
Ericsson Telefon Ab L M
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ericsson Telefon Ab L M filed Critical Ericsson Telefon Ab L M
Priority to SE0200137A priority Critical patent/SE0200137L/sv
Publication of SE0200137D0 publication Critical patent/SE0200137D0/sv
Priority to TW091105579A priority patent/TW586212B/zh
Priority to PCT/SE2003/000048 priority patent/WO2003063255A1/en
Priority to DE10392200T priority patent/DE10392200B4/de
Publication of SE0200137L publication Critical patent/SE0200137L/sv
Priority to US10/873,781 priority patent/US7025615B2/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/62—Capacitors having potential barriers
    • H10D1/64—Variable-capacitance diodes, e.g. varactors 

Landscapes

  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
  • Semiconductor Integrated Circuits (AREA)
SE0200137A 2002-01-18 2002-01-18 Tillverkningsmetod, varaktor samt integrerad krets SE0200137L (sv)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SE0200137A SE0200137L (sv) 2002-01-18 2002-01-18 Tillverkningsmetod, varaktor samt integrerad krets
TW091105579A TW586212B (en) 2002-01-18 2002-03-22 Fabrication method, varactor, and integrated circuit
PCT/SE2003/000048 WO2003063255A1 (en) 2002-01-18 2003-01-15 Fabrication method, varactor, and integrated circuit
DE10392200T DE10392200B4 (de) 2002-01-18 2003-01-15 Herstellungsverfahren und Varaktor
US10/873,781 US7025615B2 (en) 2002-01-18 2004-06-22 Fabrication method, varactor, and integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0200137A SE0200137L (sv) 2002-01-18 2002-01-18 Tillverkningsmetod, varaktor samt integrerad krets

Publications (2)

Publication Number Publication Date
SE0200137D0 true SE0200137D0 (sv) 2002-01-18
SE0200137L SE0200137L (sv) 2003-07-19

Family

ID=20286696

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0200137A SE0200137L (sv) 2002-01-18 2002-01-18 Tillverkningsmetod, varaktor samt integrerad krets

Country Status (5)

Country Link
US (1) US7025615B2 (sv)
DE (1) DE10392200B4 (sv)
SE (1) SE0200137L (sv)
TW (1) TW586212B (sv)
WO (1) WO2003063255A1 (sv)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6521506B1 (en) * 2001-12-13 2003-02-18 International Business Machines Corporation Varactors for CMOS and BiCMOS technologies
KR100673896B1 (ko) * 2004-07-30 2007-01-26 주식회사 하이닉스반도체 트렌치 구조의 소자분리막을 갖는 반도체소자 및 그 제조방법
US7518215B2 (en) * 2005-01-06 2009-04-14 International Business Machines Corporation One mask hyperabrupt junction varactor using a compensated cathode contact
DE102006046727B4 (de) * 2006-10-02 2010-02-18 Infineon Technologies Ag Verfahren zur Herstellung einer Halbleiterstruktur mit einem Varaktor und einem Hochfrequenztransistor
US7449389B2 (en) 2006-10-27 2008-11-11 Infineon Technologies Ag Method for fabricating a semiconductor structure
US7692271B2 (en) 2007-02-28 2010-04-06 International Business Machines Corporation Differential junction varactor
US8053866B2 (en) * 2009-08-06 2011-11-08 Freescale Semiconductor, Inc. Varactor structures
DE102018213633B9 (de) * 2018-08-13 2025-01-09 Infineon Technologies Ag Halbleitervorrichtung
FR3143853A1 (fr) * 2022-12-14 2024-06-21 Stmicroelectronics (Crolles 2) Sas Diode à capacité variable

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4106953A (en) * 1976-12-28 1978-08-15 Motorola, Inc. Method of producing an ion implanted tuning diode
JPS5529169A (en) * 1978-08-23 1980-03-01 Mitsubishi Electric Corp Variable capacity diode and manufacturing thereof
US4987459A (en) * 1989-01-19 1991-01-22 Toko, Inc. Variable capacitance diode element having wide capacitance variation range
US5405790A (en) * 1993-11-23 1995-04-11 Motorola, Inc. Method of forming a semiconductor structure having MOS, bipolar, and varactor devices
JP2755135B2 (ja) * 1993-11-25 1998-05-20 日本電気株式会社 可変容量装置および該可変容量装置を有する半導体集積回路装置
US5477197A (en) 1994-10-24 1995-12-19 At&T Corp. Voltage controlled oscillator with improved voltage versus frequency characteristic
CN1252809C (zh) * 1999-09-17 2006-04-19 因芬尼昂技术股份公司 在浅槽中形成深槽以隔离半导体器件的自对准方法
EP1137055A1 (de) * 2000-03-24 2001-09-26 Infineon Technologies AG Verfahren zur Herstellung einer Hochfrequenz-Halbleiterstruktur und Hochfrequenz-Halbleiterstruktur
US6559024B1 (en) * 2000-03-29 2003-05-06 Tyco Electronics Corporation Method of fabricating a variable capacity diode having a hyperabrupt junction profile
EP1139434A3 (en) * 2000-03-29 2003-12-10 Tyco Electronics Corporation Variable capacity diode with hyperabrubt junction profile
US6995068B1 (en) * 2000-06-09 2006-02-07 Newport Fab, Llc Double-implant high performance varactor and method for manufacturing same

Also Published As

Publication number Publication date
DE10392200B4 (de) 2009-01-22
TW586212B (en) 2004-05-01
US20040235257A1 (en) 2004-11-25
DE10392200T5 (de) 2005-01-05
US7025615B2 (en) 2006-04-11
SE0200137L (sv) 2003-07-19
WO2003063255A1 (en) 2003-07-31

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