SE515115C2 - Metod och anordning att anbringa och övervaka tunna filmer och deras tjocklek på ett skivformat substrat - Google Patents

Metod och anordning att anbringa och övervaka tunna filmer och deras tjocklek på ett skivformat substrat

Info

Publication number
SE515115C2
SE515115C2 SE9302985A SE9302985A SE515115C2 SE 515115 C2 SE515115 C2 SE 515115C2 SE 9302985 A SE9302985 A SE 9302985A SE 9302985 A SE9302985 A SE 9302985A SE 515115 C2 SE515115 C2 SE 515115C2
Authority
SE
Sweden
Prior art keywords
coating
thickness
light
measurements
substrate
Prior art date
Application number
SE9302985A
Other languages
English (en)
Swedish (sv)
Other versions
SE9302985L (sv
SE9302985D0 (sv
Inventor
Michel Hannotiau
Guy Renard
Robert Terneu
Original Assignee
Glaverbel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Glaverbel filed Critical Glaverbel
Publication of SE9302985D0 publication Critical patent/SE9302985D0/xx
Publication of SE9302985L publication Critical patent/SE9302985L/
Publication of SE515115C2 publication Critical patent/SE515115C2/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Textile Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Physical Vapour Deposition (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Surface Treatment Of Glass (AREA)
SE9302985A 1992-09-15 1993-09-14 Metod och anordning att anbringa och övervaka tunna filmer och deras tjocklek på ett skivformat substrat SE515115C2 (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929219450A GB9219450D0 (en) 1992-09-15 1992-09-15 Thin film thickness monitoring and control

Publications (3)

Publication Number Publication Date
SE9302985D0 SE9302985D0 (sv) 1993-09-14
SE9302985L SE9302985L (sv) 1994-03-16
SE515115C2 true SE515115C2 (sv) 2001-06-11

Family

ID=10721896

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9302985A SE515115C2 (sv) 1992-09-15 1993-09-14 Metod och anordning att anbringa och övervaka tunna filmer och deras tjocklek på ett skivformat substrat

Country Status (17)

Country Link
US (1) US5396080A (fr)
JP (1) JPH06201333A (fr)
CN (1) CN1049045C (fr)
AU (1) AU664474B2 (fr)
BE (1) BE1006795A3 (fr)
CA (1) CA2105635A1 (fr)
CZ (1) CZ289962B6 (fr)
DE (1) DE4331355A1 (fr)
ES (1) ES2078864B1 (fr)
FI (1) FI933971A7 (fr)
FR (1) FR2695721B1 (fr)
GB (2) GB9219450D0 (fr)
IT (1) IT1261253B (fr)
LU (1) LU88402A1 (fr)
NL (1) NL194246C (fr)
PT (1) PT101364B (fr)
SE (1) SE515115C2 (fr)

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DE19735246C2 (de) * 1997-08-14 1999-07-15 Bayern Freistaat Verfahren zur Bestimmung eines Volumens
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CN114292032B (zh) * 2021-12-30 2023-07-25 凯盛信息显示材料(洛阳)有限公司 一种导电玻璃的在线镀膜方法及在线镀膜装置
WO2023210153A1 (fr) * 2022-04-27 2023-11-02 浜松ホトニクス株式会社 Dispositif de mesure de distribution d'indice de réfraction, dispositif de mesure de distribution d'épaisseur de film, procédé de mesure de distribution d'indice de réfraction et procédé de mesure de distribution d'épaisseur de film
CN115046588A (zh) * 2022-06-19 2022-09-13 上海市建筑科学研究院有限公司 钢构件防火防腐涂层厚度和缺陷的检测方法
CN115807219B (zh) * 2023-02-13 2023-05-30 南昌大学 一种光电薄膜材料制备控制系统及方法
CN116603716B (zh) * 2023-04-28 2024-03-29 宁波市融嘉轻合金科技有限公司 一种压铸件表面处理方法、系统、智能终端及存储介质
CN117865447A (zh) * 2023-12-29 2024-04-12 威海中玻新材料技术研发有限公司 浮法在线镀膜热端实时质量检测装置
CN118051069B (zh) * 2024-03-29 2024-07-16 广州泽亨实业有限公司 一种涂层厚度自动控制方法和系统

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Also Published As

Publication number Publication date
SE9302985L (sv) 1994-03-16
PT101364A (pt) 1994-12-30
AU4487393A (en) 1994-03-24
JPH06201333A (ja) 1994-07-19
NL194246B (nl) 2001-06-01
ITTO930654A0 (it) 1993-09-08
CN1085655A (zh) 1994-04-20
GB2270561B (en) 1996-07-17
US5396080A (en) 1995-03-07
BE1006795A3 (fr) 1994-12-13
GB9318814D0 (en) 1993-10-27
CZ9301924A3 (cs) 2001-12-12
GB9219450D0 (en) 1992-10-28
IT1261253B (it) 1996-05-09
NL194246C (nl) 2001-10-02
CA2105635A1 (fr) 1994-03-16
SE9302985D0 (sv) 1993-09-14
AU664474B2 (en) 1995-11-16
CZ289962B6 (cs) 2002-05-15
ES2078864A2 (es) 1995-12-16
FI933971A7 (fi) 1994-03-16
LU88402A1 (fr) 1995-04-05
DE4331355A1 (de) 1994-03-17
ES2078864B1 (es) 1997-05-16
FR2695721B1 (fr) 1995-02-24
FR2695721A1 (fr) 1994-03-18
ES2078864R (fr) 1996-12-16
GB2270561A (en) 1994-03-16
PT101364B (pt) 1999-11-30
NL9301577A (nl) 1994-04-05
ITTO930654A1 (it) 1995-03-08
CN1049045C (zh) 2000-02-02
FI933971A0 (fi) 1993-09-10

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