SE9403988L - Apparat för alstring av linjär ljusbågsurladdning för plasmabearbetning - Google Patents

Apparat för alstring av linjär ljusbågsurladdning för plasmabearbetning

Info

Publication number
SE9403988L
SE9403988L SE9403988A SE9403988A SE9403988L SE 9403988 L SE9403988 L SE 9403988L SE 9403988 A SE9403988 A SE 9403988A SE 9403988 A SE9403988 A SE 9403988A SE 9403988 L SE9403988 L SE 9403988L
Authority
SE
Sweden
Prior art keywords
pct
electrode
arc discharge
electrode plate
date
Prior art date
Application number
SE9403988A
Other languages
Unknown language ( )
English (en)
Swedish (sv)
Other versions
SE503141C2 (sv
SE9403988D0 (sv
Inventor
Ladislav Bardos
Hana Barankova
Original Assignee
Ladislav Bardos
Hana Barankova
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ladislav Bardos, Hana Barankova filed Critical Ladislav Bardos
Priority to SE9403988A priority Critical patent/SE9403988L/
Publication of SE9403988D0 publication Critical patent/SE9403988D0/xx
Priority to AU39420/95A priority patent/AU688996B2/en
Priority to JP51676196A priority patent/JP3652702B2/ja
Priority to PCT/SE1995/001248 priority patent/WO1996016531A1/fr
Priority to DK95937260T priority patent/DK0792572T3/da
Priority to ES95937260T priority patent/ES2138755T3/es
Priority to CA002205576A priority patent/CA2205576C/fr
Priority to DE69511103T priority patent/DE69511103T2/de
Priority to US08/836,708 priority patent/US5908602A/en
Priority to EP95937260A priority patent/EP0792572B1/fr
Priority to KR1019970703347A priority patent/KR100333800B1/ko
Priority to AT95937260T priority patent/ATE182738T1/de
Publication of SE503141C2 publication Critical patent/SE503141C2/sv
Publication of SE9403988L publication Critical patent/SE9403988L/
Priority to NO972280A priority patent/NO309920B1/no

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H05H1/50—Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
SE9403988A 1994-11-18 1994-11-18 Apparat för alstring av linjär ljusbågsurladdning för plasmabearbetning SE9403988L (sv)

Priority Applications (13)

Application Number Priority Date Filing Date Title
SE9403988A SE9403988L (sv) 1994-11-18 1994-11-18 Apparat för alstring av linjär ljusbågsurladdning för plasmabearbetning
AT95937260T ATE182738T1 (de) 1994-11-18 1995-10-20 Vorrichtung zur erzeugung einer linearen bogenentladung für plasmabehandlung
CA002205576A CA2205576C (fr) 1994-11-18 1995-10-20 Appareil pour produire une decharge en arc lineaire, pour un traitement par plasma
US08/836,708 US5908602A (en) 1994-11-18 1995-10-20 Apparatus for generation of a linear arc discharge for plasma processing
PCT/SE1995/001248 WO1996016531A1 (fr) 1994-11-18 1995-10-20 Appareil pour produire une decharge en arc lineaire, pour un traitement par plasma
DK95937260T DK0792572T3 (da) 1994-11-18 1995-10-20 Apparat til frembringelse af en lineær bueudladning til plasmabearbejdning
ES95937260T ES2138755T3 (es) 1994-11-18 1995-10-20 Aparato para producir una descarga en arco lineal, para un tratamiento por plasma.
AU39420/95A AU688996B2 (en) 1994-11-18 1995-10-20 An apparatus for generation of a linear arc discharge for plasma processing
DE69511103T DE69511103T2 (de) 1994-11-18 1995-10-20 Vorrichtung zur erzeugung einer linearen bogenentladung für plasmabehandlung
JP51676196A JP3652702B2 (ja) 1994-11-18 1995-10-20 プラズマ処理用線形アーク放電発生装置
EP95937260A EP0792572B1 (fr) 1994-11-18 1995-10-20 Appareil pour produire une decharge en arc lineaire, pour un traitement par plasma
KR1019970703347A KR100333800B1 (ko) 1994-11-18 1995-10-20 플라즈마처리를 위한 선형 아크방전 발생장치
NO972280A NO309920B1 (no) 1994-11-18 1997-05-20 Lineær bueutladning ved plasmaprosessering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9403988A SE9403988L (sv) 1994-11-18 1994-11-18 Apparat för alstring av linjär ljusbågsurladdning för plasmabearbetning

Publications (3)

Publication Number Publication Date
SE9403988D0 SE9403988D0 (sv) 1994-11-18
SE503141C2 SE503141C2 (sv) 1996-04-01
SE9403988L true SE9403988L (sv) 1996-04-01

Family

ID=20396028

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9403988A SE9403988L (sv) 1994-11-18 1994-11-18 Apparat för alstring av linjär ljusbågsurladdning för plasmabearbetning

Country Status (13)

Country Link
US (1) US5908602A (fr)
EP (1) EP0792572B1 (fr)
JP (1) JP3652702B2 (fr)
KR (1) KR100333800B1 (fr)
AT (1) ATE182738T1 (fr)
AU (1) AU688996B2 (fr)
CA (1) CA2205576C (fr)
DE (1) DE69511103T2 (fr)
DK (1) DK0792572T3 (fr)
ES (1) ES2138755T3 (fr)
NO (1) NO309920B1 (fr)
SE (1) SE9403988L (fr)
WO (1) WO1996016531A1 (fr)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19722624C2 (de) * 1997-05-30 2001-08-09 Je Plasmaconsult Gmbh Vorrichtung zur Erzeugung einer Vielzahl von Niedertemperatur-Plasmajets
SE511139C2 (sv) * 1997-11-20 1999-08-09 Hana Barankova Plasmabearbetningsapparat med vridbara magneter
SE516336C2 (sv) * 1999-04-28 2001-12-17 Hana Barankova Apparat för plasmabehandling av ytor
US7091605B2 (en) * 2001-09-21 2006-08-15 Eastman Kodak Company Highly moisture-sensitive electronic device element and method for fabrication
US6444945B1 (en) 2001-03-28 2002-09-03 Cp Films, Inc. Bipolar plasma source, plasma sheet source, and effusion cell utilizing a bipolar plasma source
US6764658B2 (en) * 2002-01-08 2004-07-20 Wisconsin Alumni Research Foundation Plasma generator
US20030168009A1 (en) * 2002-03-08 2003-09-11 Denes Ferencz S. Plasma processing within low-dimension cavities
KR100650094B1 (ko) * 2002-08-30 2006-11-27 세키스이가가쿠 고교가부시키가이샤 플라즈마 처리 장치
EP1554412B1 (fr) * 2002-09-19 2013-08-14 General Plasma, Inc. Appareil de dépôt chimique en phase vapeur assisté par plasma
US7411352B2 (en) * 2002-09-19 2008-08-12 Applied Process Technologies, Inc. Dual plasma beam sources and method
JP3933035B2 (ja) * 2002-11-06 2007-06-20 富士ゼロックス株式会社 カーボンナノチューブの製造装置および製造方法
US7038389B2 (en) * 2003-05-02 2006-05-02 Applied Process Technologies, Inc. Magnetron plasma source
US7867366B1 (en) 2004-04-28 2011-01-11 Alameda Applied Sciences Corp. Coaxial plasma arc vapor deposition apparatus and method
US8038858B1 (en) 2004-04-28 2011-10-18 Alameda Applied Sciences Corp Coaxial plasma arc vapor deposition apparatus and method
DE102004043967B4 (de) * 2004-09-11 2010-01-07 Roth & Rau Ag Anordnung und Verfahren zur Plasmabehandlung eines Substrates
FR2912864B1 (fr) * 2007-02-15 2009-07-31 H E F Soc Par Actions Simplifi Dispositif pour generer un plasma froid dans une enceinte sous vide et utilisation du dispositif pour des traitements thermochimiques
KR101468077B1 (ko) * 2007-07-19 2014-12-05 엘아이지에이디피 주식회사 상압 플라즈마 처리장치
WO2009149563A1 (fr) * 2008-06-13 2009-12-17 Fablab Inc. Système et procédé de fabrication d’objets macroscopiques, et objets nano-assemblés ainsi obtenus
CN105177526B (zh) * 2008-08-04 2018-12-11 北美Agc平板玻璃公司 等离子体源和用等离子体增强的化学气相沉积来沉积薄膜涂层的方法
RU2370002C1 (ru) * 2008-10-20 2009-10-10 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Способ получения плазменного источника излучения и устройство для его осуществления
WO2011156877A1 (fr) * 2010-06-18 2011-12-22 Mahle Metal Leve S/A Dispositif de traitement au plasma
WO2011156876A1 (fr) * 2010-06-18 2011-12-22 Mahle Metal Leve S/A Dispositif de traitement au plasma
US8697198B2 (en) * 2011-03-31 2014-04-15 Veeco Ald Inc. Magnetic field assisted deposition
US9508532B2 (en) 2013-03-13 2016-11-29 Bb Plasma Design Ab Magnetron plasma apparatus
KR102272311B1 (ko) 2014-12-05 2021-07-06 에이쥐씨 글래스 유럽 중공형 음극 플라즈마 소스
ES2900321T3 (es) 2014-12-05 2022-03-16 Agc Flat Glass Na Inc Fuente de plasma que utiliza un recubrimiento de reducción de macropartículas y procedimiento para usar una fuente de plasma que utiliza un recubrimiento de reducción de macropartículas para la deposición de recubrimientos de película delgada y modificación de superficies
US9721764B2 (en) 2015-11-16 2017-08-01 Agc Flat Glass North America, Inc. Method of producing plasma by multiple-phase alternating or pulsed electrical current
US9721765B2 (en) 2015-11-16 2017-08-01 Agc Flat Glass North America, Inc. Plasma device driven by multiple-phase alternating or pulsed electrical current
US10242846B2 (en) 2015-12-18 2019-03-26 Agc Flat Glass North America, Inc. Hollow cathode ion source
US10573499B2 (en) 2015-12-18 2020-02-25 Agc Flat Glass North America, Inc. Method of extracting and accelerating ions
RU168090U1 (ru) * 2016-06-06 2017-01-18 Акционерное общество "Научно-исследовательский институт оптико-электронного приборостроения" АО "НИИ ОЭП" Плазменный источник светового излучения
RU168022U1 (ru) * 2016-06-15 2017-01-17 Акционерное общество "Научно-исследовательский институт оптико-электронного приборостроения" АО "НИИ ОЭП" Плазменный источник светового излучения
CN111225944B (zh) * 2017-08-07 2023-03-28 春日电机股份有限公司 表面改性装置
KR102216854B1 (ko) * 2019-09-30 2021-02-17 포항공과대학교 산학협력단 마이크로파 플라즈마를 이용한 아크 방전장치 및 아크 방전방법
FR3115180B1 (fr) * 2020-10-14 2022-11-04 Peter Choi Appareil de génération de plasma
CN115928029B (zh) * 2022-11-25 2025-06-24 苏州臻锂新材科技有限公司 一种溅射沉积组件、沉积室、真空沉积设备

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3562141A (en) * 1968-02-23 1971-02-09 John R Morley Vacuum vapor deposition utilizing low voltage electron beam
US4521286A (en) * 1983-03-09 1985-06-04 Unisearch Limited Hollow cathode sputter etcher
FR2581244B1 (fr) * 1985-04-29 1987-07-10 Centre Nat Rech Scient Source d'ions du type triode a une seule chambre d'ionisation a excitation haute frequence et a confinement magnetique du type multipolaire
CS246982B1 (en) * 1985-06-17 1986-11-13 Ladislav Bardos Method and apparatus for producing chemically active environment for plasma chemical reactions namely for deposition of thin layers
DE3606959A1 (de) * 1986-03-04 1987-09-10 Leybold Heraeus Gmbh & Co Kg Vorrichtung zur plasmabehandlung von substraten in einer durch hochfrequenz angeregten plasmaentladung
EP0273741B1 (fr) * 1986-12-29 1991-10-23 Sumitomo Metal Industries, Ltd. Dispositif à plasma
NL8701530A (nl) * 1987-06-30 1989-01-16 Stichting Fund Ond Material Werkwijze voor het behandelen van oppervlakken van substraten met behulp van een plasma en reactor voor het uitvoeren van die werkwijze.
EP0431951B1 (fr) * 1989-12-07 1998-10-07 Research Development Corporation Of Japan Méthode et appareil de traitement par plasma sous pression atmosphérique
US5133986A (en) * 1990-10-05 1992-07-28 International Business Machines Corporation Plasma enhanced chemical vapor processing system using hollow cathode effect
US5279723A (en) * 1992-07-30 1994-01-18 As Represented By The United States Department Of Energy Filtered cathodic arc source
DE4235953C2 (de) * 1992-10-23 1998-07-02 Fraunhofer Ges Forschung Sputterquelle mit einer linearen Hohlkathode zum reaktiven Beschichten von Substraten
SE501888C2 (sv) * 1993-10-18 1995-06-12 Ladislav Bardos En metod och en apparat för generering av en urladdning i egna ångor från en radiofrekvenselektrod för kontinuerlig självförstoftning av elektroden

Also Published As

Publication number Publication date
AU688996B2 (en) 1998-03-19
SE503141C2 (sv) 1996-04-01
EP0792572B1 (fr) 1999-07-28
EP0792572A1 (fr) 1997-09-03
NO972280D0 (no) 1997-05-20
DE69511103D1 (de) 1999-09-02
US5908602A (en) 1999-06-01
JPH10509833A (ja) 1998-09-22
CA2205576A1 (fr) 1996-05-30
ES2138755T3 (es) 2000-01-16
AU3942095A (en) 1996-06-17
KR100333800B1 (ko) 2002-11-27
WO1996016531A1 (fr) 1996-05-30
DE69511103T2 (de) 2000-04-13
SE9403988D0 (sv) 1994-11-18
DK0792572T3 (da) 2000-03-13
NO972280L (no) 1997-07-10
ATE182738T1 (de) 1999-08-15
CA2205576C (fr) 2005-09-20
NO309920B1 (no) 2001-04-17
JP3652702B2 (ja) 2005-05-25

Similar Documents

Publication Publication Date Title
SE9403988L (sv) Apparat för alstring av linjär ljusbågsurladdning för plasmabearbetning
TW325582B (en) Plasma treatment device and plasma treatment method
KR910010634A (ko) 건식 처리장치
TR200102475T2 (tr) Ozon üreticisi ve ozon üretme yöntemi
ATE51855T1 (de) Kesselsteinverhuetung.
AU2003266900A1 (en) Waveform generator electronics based on tuned lc circuits
DK208190D0 (da) Elektrisk maskine
MY127490A (en) Segmented counterelectrodes for an electrolytic treatment system
KR910002310A (ko) 플라즈마 처리장치
PL324110A1 (en) Ozone generating method and apparatus
DE69406220D1 (de) Minenräumvorrichtung
ATE229368T1 (de) Gasbehandlungskomponente
AU2004319231A1 (en) Plasma processing method and system therefor
BR0309959A (pt) Dispositivo e método para disparar um centelhador
ATE200945T1 (de) Anordnung zur ableitung von überspannungen und zur löschung des netzfolgestromes
JPS57159025A (en) Method and device for dry etching
EP0244842A3 (fr) Appareil pour la production d'une couche mince
TW364061B (en) Voltmeter, suitable for medium/high-voltage devices, having a surface-wave device
AU5504899A (en) Device for generating ionized gases using corona discharges
MD1368F1 (en) Installation for electric spark alloying
JPS5681151A (en) Particle charging apparatus
SU1314717A1 (ru) Способ упрочнения поверхностей изделий в вакууме и устройство для его осуществления
Hazza Influence of generation on voltage sags
JPS5645758A (en) Gas reaction apparatus
SU1289308A1 (ru) Устройство для вакуумно-плазменного травления пластин из немагнитных материалов

Legal Events

Date Code Title Description
NUG Patent has lapsed